AC

Description Material VER2000 VER4000/4001 VS7-1-A DXT172-8-6 AXT500-13 Metallic painted Body q w e !1 Aluminum alloy VS7-2-A Aluminum alloy Sub-plate r t y u i o !0 !2 !3 !4 !5 !6 Block packing !

HRX-OM-R026

Release the alarm referring Chapter 6.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

tubing A B C Model Number of distribution ports Applicable tubing A B C VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 6 VB4-6 VB6-6 VB8-6 4 6 8 74 102 130 96.5 124.5 152.5 62 90 118 82.5 110.5 152.5 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

Speed Controller with Indicator

For Flow Control Equipment Precautions, refer to the Handling Precautions for SMC Products and Operation Manual on the SMC website, http://www.smcworld.com Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

CUJ

4 7.85 4.71 IN 15.7 10.99 2025.13 15.07 OUT 50.3 35.18 8 5 15.31 9.18 IN 30.6 21.44 Data 39.26 23.56 OUT 78.5 54.97 10 6 25.13 15.07 IN 50.3 35.18 Spring Reaction Force/Single Acting Standard Stroke Bore size (mm) 4 6 8, 10 4 6 8, 10 Standard stroke (mm) 4, 6, 8, 10 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 4, 6 4, 6, 8 4, 6, 8, 10 Action IN Spring in pre-loaded condition Spring in loaded condition

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

VQ5000

Note2) For thread standard, refer to page 2-6-39.

ALF400 to 900, ALT-5/-9

A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Angular Air Gripper Series MHC2/MHCA2/MHCM2

Weight calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis IZ2 = {m2 (d2 x e2) / 12} x 10-6 IZ2 = {3.24 x 10-4 x (42 + 52) / 12} x 10-6 = 1.11 x 10-9 (kg.m2) = 1.11 x 10-9 + 3.24 x 10-4 x 23.52 x 10-6 = 0.18 x 10-6 (kg.m2) Inertial moment around Z axis IB = IZ2 x m2r22 x 10-6 IB Thus, the total inertial moment is I

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21 31 43 41 13-/22-MXS6-10 13-/22-MXS6-20 13-/22-MXS6-30 13-/22-MXS6-40 13-/22-MXS6-50 780 MXS 1322Air Slide Table Dimensions: MXS6 13221322Axial piping (6): MXS6-P 26.3 Max. 5.6 Operating port 2 x M3 x 0.5 12 5.5 11.5 8 Other dimensions are the same as those of basic type. 781 MXS 1322Air Slide Table Dimensions: MXS6L / Symmetric Type 1322Air

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A 6.

Cylinder with Lock

y @8 #6 e t u i !

CL

6 !7 !8 !

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.