Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 50mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length, m: 3, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 350mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: N (NPN), I/O Cable Length, m: w/o Cable, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 350mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 1 (1.5), Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 300mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: 5, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 300mm

Controller Series: LECP1 (Programless Controller), Parallel I/O Type: P (PNP), I/O Cable Length, m: w/o Cable, Actuator Series: LEY (Rod Type), Size: 25, Motor Mounting Position: Top Mounting Type, Lead: A (Size 16: 10mm, Size 25: 12mm, Size 32: 16mm), Stroke: 350mm

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 200mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 5 (5m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O

Protocol: 9 (EtherNet/IPâ„¢), Mounting: 7 (Screw Mounting), Cable Connector: w/o Plug Connector, Actuator: LEY, Type: Rod Type, Body Size: 25, Bearing Type: None, Motor Mounting: Top Mounting Type, Lead: A (16: 10mm; 25: 12mm; 32, 40: 16mm), Stroke: 350mm

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 30mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Controller Type - LEC, JXC: CM1 ( (JXCM1 CC-Link, Direct Input Type

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 250mm, Motor Option: C (w/Motor Cover), Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: A (10m), Controller Type - LEC, JXC: CM1 ( (JXCM1 CC-Link, Direct Input Type

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 150mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 3 (3m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I/O

Size: 25, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: A (Size 16: 10mm, Size 25: 12mm, Size 32/40: 16mm), Stroke: 100mm, Motor Option: None, Rod End Thread: Female, Mounting: Both Ends Tapped (Standard), Actuator Cable: R (Robotic Flexible Cable), Actuator Cable Length: 1 (1.5m), Controller Type - LEC, JXC: C61 (JXC61, Parallel PNP, Step Data Input Type), I

Vacuum Unit

(Refer to page 33.) 17 A Vacuum Unit ZK2mA Series Specifications General Specifications Valve Common Specifications Model4 ZK2-VAmK ZK2-VAmR ZK2-VAmJ 5 to 50C Without pressure sensor/switch With pressure sensor 0 to 50C With pressure sensor 5 to 50C Pressure switch with energy saving function Fluid Air Operating temperature range (No condensation) Type of actuation5 Supply valve: N.C.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

Compact Manifold Regulator

Note 2) 5 to 50C when the digital pressure switch will be used.

Dedicated Controller Series LC1 Uniaxial Type

5 to 50C 5 to 50C 5 to 50C 5 to 40C 5 to 40C 5 to 40C 5 to 40C Electric energy 180VA 640VA 300VA 300VA 640VA 100VA 300VA 640VA 640VA 300VA 180VA 300VA Control system AC software servo/PTP control Position detection system Incremental encoder Home position return function Maximum positioning point setting With magnet switch as adjacent switch, and encoder Z phase signal as home position signal

Multistage Ejector (N)ZL Series

Fluid Air Operating pressure range Internal pilot type 0.2 to 0.5MPa (29 to 72 psi) 5 to 50C (41 to 122F) Ambient and fluid temperature Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Slotted locking type With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

3cP) or less Detection style Karman vortex Flow rate measuring range 0.4 to 4l/min 1.8 to 20l/min Note 1) 4 to 40l/min Operating pressure range Note 2) 0 to 1MPa 0 to 0.6MPa Proof pressure Note 3) 1.5MPa 0.9MPa Operating fluid temperature 0 to 90C Linearity Note 4) 2.5%F.S. or less (at 25C water) Repeatability 1%F.S. or less (at 25C water) Temperature characteristics 5%F.S. or less (0 to 50C

For Water Digital Flow Switch Series PFW

vortex Detection type 2 to16l/min 0.5 to 4 (setting is 0.6 to 4) l/min 5 to 40l/min Flow rate measurement and setting range 0.1l/min 0.05l/min 0.5l/min Minimum setting unit l/min, gal (US)/min Real-time flow rate Note 1) Display units l, gal (US) Accumulated flow Operating pressure range 0 to 1MPa Withstand pressure 1.5MPa 0 to 9l Accumulated flow range Operating temperature range 0 to 50C

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric