AS

C D E F G H J K L AS10;0P-04-04 AS20;0P-04-04 AS20;0P-06-06 AS25;0P-06-06 AS30;0P-08-08 AS30;0P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 High temperature XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 Temperature Valve size specifications 63 80 General use XLG63-30-1-2 XLG80-30-1-2 High temperature XLG63-30-1H-2 XLG80-30-1H-2 Note 1) Add the seal material symbol

Digital Pressure Switch

kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p) 10% at max. spec.

Digital Pressure Switch ( compatible)

), ripple max. 10% voltage Power supply spec.

Cylinder

Stroke : ~ " SOte size6 M ounting blackel . 10 15 Bore size(mm) Stroke (mm) 6 5,10, 15,20 Flan,!le ' CP-FOO6 CP-F010 ,CP-F01 5 F00~ . CP-L006ICP-LOHi jCP-i:015 10 5, 10, 1 5, 20 ,(25)~ 30 Tluhnlmfwrth pi~): CP-T006Ic P-TOlO lCP-T015 15 5,1 0,15, 20, (25 )~ 30 ItI Smm spacer is added to the 30mm stroke cylinder.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Flow Sensor Series PFMV

PFM PFMV PF2A PF2W PF2D IF 959 Series PFMV3 Dimensions 30 3 31 Thread depth 4 2 x M3 x 0.5 20 0.1 Power supply / Output connector 1.5 10 Sensor connector 3.2 1.5 8.2 Sensor connector (ZS-28-C) Terminal name DC (+) N.C.

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

CEx-OMB0075

A-phase pulse B-phase pulse 11 12 11 10 10 Count multiplier In rod extending direction, A-phase turns on first, then B-phase turns on with the delay of In rod retracting direction, B-phase turns on first, then A-phase turns on with the delay of approximately 90 phase difference. approximately 90 phase difference. Counter performs addition in and does subtraction in .

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ 0 5 1 1 0 1 10 CE compliant Series 10-VV5Q11-08C6SV 10-VQ1100-51 10-VQ1200-51 10-VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

In-line Air Filter

pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min

IDX-OM-Z004

6 2 GWP IDX-OM-Z004 6 6.3 IDF100F-30-W () (10, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) ( 4

HEC_001W-E

C 10 20 30 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. Fig. 5-6 Cooling capacity *The Radiating water flow rate of 1L/min is for reference. Radiating water Temp.20 Ambient Temp.20 Fluid water 1000 Cooling capacity W 5 Radiating water flow rate L/min 800 1 3 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp.

CC

E101. 10-17-16

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLC16-30-1-2 XLC25-30-1-2 XLC40-30-1-2 XLC50-30-1-2 High temperature XLC16-30-1H-2 XLC25-30-1H-2 XLC40-30-1H-2 XLC50-30-1H-2 Temperature Valve size specifications 63 80 General use XLC63-30-1-2 XLC80-30-1-2 High temperature XLC63-30-1H-2 XLC80-30-1H-2 Note 1) Add the seal material symbol

CC

CHKDB CHKGB Double acting, Single rod 40 10 16 CX 50 5, 10, 15, 20, 25, 30 35, 40, 45, 50, 75 100 63 CY 80 100 MQQ M CHKDB CHKGB RHC MK(2) RS Q G RS H A For details, refer to the catalog CAT. E111.

JXCx-OMT0062

Please refer to 10. Memory map for details of each signal.