B-1 A-1 B-2 A-2 B-3 A-3 Nil Circuit Cable color 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Vcc GND A A B B Brown Black Red Black Orange Black B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.
XL H7 H7 2-P PB GB GA 2-P Q J K (Plug) PA+stroke S G FA FB C+stroke B+stroke A+stroke E MGPM, MGPL/Common Dimensions Standard stroke (mm) Bore (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 59.5 37.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 12.5 112 120 148 162 24 27 32 39 M8 X 1.25 20 20 22 22 M8 X 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 16 16 20 20 9 M6 M6 M8 24 27
150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM
HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (128
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
x 0.8 2-P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2-P through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5
150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM
Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size
Refer to page 100 for part numbers. 289 Made to Order Series LXP AC Servomotor Specification Guide Rod Type With Motor Brake/Without Motor Brake How to Order X12 LX P B A B D 100 F9N 1 S B AC servomotor specification Guide rod type P Actuator configuration Refer to the applicable motor list on the next page. Number of auto switches Ball bushing B Guide type 1 2 1 pc. 2 pcs.
(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.
Mounting Basic Axial foot Front flange Rear flange Front trunnion Rear trunnion Clevis B L F G U T D Stroke (mm) Refer to p.1.7-27 for Standard Stroke Table. Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch. Mounting brackets are included, not mounted.
B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37
(One label for each) D side U side SUP/EXH block bush assembly SUP Block bush assembly 5(R1) 1(P) 3(R2) D side U side R1 P R2 VVQ1000-87A-B-50 Shut off label 7.8 ~ =6.5 2(B) 4(A) 2(B) 4(A)
Applicable bore size (mm) d H1 B1 C1 Width across flats L 2-P through 4-T counterbore S + Stroke Z + 2 x Stroke W + Stroke 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 A' A' M4 x 0.7 2.4 7 8.1 M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 Bore size (mm) A GB H A' B J C K D L MM E NN GA P Q QA 6 10 16 20 25 32 15 16.5 16.5
center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.
0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D
(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.
How To Order NC D A1 B 150 0400 R + 0200 H XC11 Auto Switch Mounting Bore Stroke B-A Stroke B Dual Operation Single Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B BA C D DD E EA EE G J NT TN WF XT Y LF P A PB PC 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1/4-20 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200
P [Application pending] P Restriction of environmentally hazardous substancesRoHS compliant Series VXK CAT.ES70-34B w w d d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.