Stations: 05, System, Port Combinations: Vacuum Pump System, Common PV: ø8, Common PS: ø6, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: w/DIN Rail Mounting Bracket, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 05, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: -, Manifold Assembly, Delivery Condition: -

Stations: 05 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: Q (Vacuum Pump System), Pressure Switch for Vacuum/Pressure Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: C [Vacuum Pump System PE Port Female

.: 03 (ø5/32"), Actuator Type: 05 (Straight Plunger), Suffix: None, Indicator: Z (w/Miniature Indicator)

Body Class: 2 (ø4 Orifice), Fitting Type: V, Tube Size: 05 (3/16"), Output Tube Size: None, Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Model: LVH20 (Body Class 2, N.C.), Lever Operation: Non-locking, Self-reset, Tube Size: 05 (3/16")

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

AMX-OM-L020_e

O . auto drai n: M i n. 0. 1 M Pa O PERATI O N M AN U AL M i n. 0. 05 M Pa Keep f ol l ow i ng t o operat e M ai n l i ne f i l t er properl y. M ax. 1. 0 M Pa Fol l ow i ng envi ronm ent s l ead t o cause breakage. Envi ronm ent Low er t han 5 D o not use under f ol l ow i ng envi ronm ent . D o not use under f ol l ow i ng condi t i ons.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section

Directional Control Driver for Electric Cylinder

Adjusted thrust OFF: 100% thrust (Max. thrust) ON: A-PHASE (Retracted side) OFF: B-PHASE (Extended side) Output ON command input Red 2 ON Adjusted thrust command input Yellow SET 3 Traveling direction command input A-PHASE 4 Orange Cable for motor output terminal LC3F2 1 C3 02 1 CN3 Motor Output Terminal Table 2 1 Terminal Function Pin number Optional cable color Cable type Cable length 02 05

CA2

model Bore size (mm) 40 50 63 80 100 D-G39/K39 D-A3l/A44 BDS-04M BDS-05M BMB1-063 BMB1-080 BMB1-100 Auto switch model Bore size (mm) 40 50 63 80 100 D-G39/K39 D-A3l/A44 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M MB MB1 D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5NB D-B5l/B64 D-B59W D-G5l/K59 D-G5lW/K59W D-G59F D-G5NT D-G5NB D-B5l/B64 D-B59W CA2 CA2 BH2-040 BA5-050 BAF-06 BAF-08 BAF-10 BA-04 BA-05

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Compact manifold regulator ARM5 Series

Unit Representation Metric size Inch size Symbol Description Display unit for product name plate and pressure gauge: MPa Display unit for product name plate and pressure gauge: psi 4 6 4 6 Straight Elbow Straight Elbow Symbol Symbol Nil 5/32 1/4 5/32 1/4 Note) Z 04 05 16 17 54 55 66 67 Note) This option is available for use outside Japan only. (The SI units must be used in Japan.) 3.

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10