Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

2 q o !4 !7 !

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 @0 @1 Nickel plated Hexagon socket head plug Hard anodized Hexagon socket head plug Chrome molybdenum steel $1 Cylinder tube gasket Piston seal Scraper NBR NBR NBR NBR $2 $3 $4 $5 Hard anodized Electroless nickel plated Body (rodless cylinder) gasket 8-16-15 15 Series CY1F Dimensions QA Q + Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Plug-in Unit

(arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No.

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

Non-contact Gripper

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o

CC

RS Q G Valve A If the converter is positioned lower than the cylinder: RS H A Drain port (Piping port) After filling with oil as described in step 4 above, close the oil filler plug. Then, introduce air pressure of approximately 0.05 MPa into the converters air port to push the oil into the cylinder.

CQM

6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

CLQ

Component Parts No. q w e r t No. !7 !8 !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 @0 @1 Nickel plated Hexagon socket head plug Hard anodized Hexagon socket head plug Chrome molybdenum steel $1 Cylinder tube gasket Piston seal Scraper NBR NBR NBR NBR $2 $3 $4 $5 Hard anodized Electroless nickel plated Body (rodless cylinder) gasket 8-16-15 15 Series CY1F Dimensions QA Q + Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Description Material Note Component Parts Heat treated Stainless steel Body q Heat treated Table Stainless steel w u q w i o y !3 !2 !

air-filter-e

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

1.63

position is changed, go back to step q.

MHC2

9 MHC6-PS Seal kit MHCA2-6 (Short body type) Double acting/With fingers closed Single acting Double acting/With fingers open o i e q t !1 !6 w !0 r !4 u !5 !7 y !3 !2 Component Parts Material Note Material Note No. Description No. Description Hard anodized Aluminium alloy High carbon chromium bearing steel Body Needle roller q !

10

3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

3-Position Rotary Table

Thus, the total air consumption Q of the rotary table and tubing is obtained as shown below.