(301 0.s9 t22.61 0.67 (17) 0.53 0.04 (1) o.22 o.24 (6) 0.83 (21) 0.61 (15.41 3.17 2.41 0.31 (8) 0.55 13.9 Millimeters in Parentheses DIRECTIONAL AIR VALVE MANIFOLD ASSEMBLY SERIES NVF 110 Manifold gaskets: W100-3-t (2-sta.)
Power Consumption (0.5W) Interchangeable with the NVJ and NVZ Vacuum Applicable Base Mounted/Body Ported Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21
UNF-2A Port 1 D PS1290505-12-12 3.94 3.27 2.40 3.49 2.17 1.38 1.25 1-1/16-12 1-1/16-12 100.0 mm 83.0 mm 61.0 mm 88.5 mm 55.2 mm 35.0 mm 31.8 mm UN-2A UN-2A PS1690505-16-16 4.32 3.46 2.50 3.74 2.48 1.62 1.50 1-5/16-12 1-5/16-12 109.8 mm 87.9 mm 63.4 mm 94.9 mm 63.0 mm 41.3 mm 38.1 mm UN-2A UN-2A Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-21
For details of each setting, refer to page 21 to 62 of this manual. Do not touch the LCD during operation. The display can vary due to static electricity. Maintenance Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance. There is a risk of unexpected malfunction.
Dimensions Ionizer/ IZS40 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600 1900 31 1900 2320 38 2320 2500 41 2500 bar length Model Symbol for n (No. of cartridge), L IZS40 fitting A (mm) 06 13 08 15 10 22 Symbol for A Ionizer/ IZS41, IZS42 340 5 340 400 6 400 460 7 460 580 9 580 640 10 640 820 13 820 1120 18 1120 1300 21 1300 1600 26 1600
ORIG SW DIR Fixed value This is the fixed value for this controller (* it should not be changed) Undefine No.21 Fixed value This is the fixed value for this controller (* it should not be changed) * 1: The range varies depending on the actuator. Please refer to the manual of the actuator for more details. 33 - 8.
fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58
O-ring NBR 22 O-ring NBR 172 Lock-Up Valve IL201/211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel
Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.
5 16 1 4 1 4 3 8 17.46 26 17 33.5 22.23 7 17.9 30.5 25.0 3 8 31.5 22 21 33.9 Applicable tubing Reference dimensions after NPT thread installation.
S9PV2 Grommet D-S791/S792 D-T791/T792 Direct D-S7P1/S7P2 Connector D-T791C/T792C D-F8N/F8P/F8B 12-13-15 D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 12-13-16 Grommet 12-13-17 D-F79W/F7PW/J79W Grommet Rail 12-13-18 D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV 12-13-19 Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 12-13-20 D-F59W/F5PW/J59W Tie-rod Grommet D-F79F 12-13-21
Temperature stability: 0.1C (CH1) When a load is stable When a load is stable 0.1C By controlling the inverter compressor, inverter fan, and electronic expansion valve simultaneously, it maintains the good temperature stability when the heat load fluctuates. 22 Circulating fluid temperature [C] Circulating fluid temperature [C] CH1 21 20 19 26 kW load 18 0 kW load 17 0 10 20 30 40 When a
AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (6) 106 60 Body mounting reference plane Note 1) 74 58 6H9 ( ) depth 7 7 +0.030 0 +0.030 0 6H9 ( ) depth 7 13 L (3.1) A (Table traveling distance) Note 2) 86 86 (223.5) Stroke (88) (90) 61 90 Encoder Z-phase detecting position Note 3) 48.5 (4) 21
pressure: 600 psig (4.1 MPa) 1.5 (38.1) 80 0.55 0.48 70 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 0.41 60 0.34 50 0.27 40 0.69 (17.5) 0.21 30 0.14 20 2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21
NN I.~ 6 7 12 13.9 6 12.5 19.5 26.5 85 9 3.5 M3XO.5 Ml0X 1.Q 9 18.5 25.5 32.5 3 27.5 34.5 41 .5 3 10 ' h-~o 19 22 6" 14\5 21 28 12 12 3.5 I M4 XO.7 I MI5 X 1.5 1.1 ~ 2075 27 34 4 32.5 39 ~46 5 Series CJP How To Order Pin cylinder e-' '-. Rod end thread J Nil-With thread BWithout thread Mountin9 ~ BPanel mount type ..
4Small round flat washer 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 50 CKZ3N-S050T Note 1) 63 CKZ3N-S063T Note 1) eSwitch holder uProximity switch (P&F) iHelical torsion spring oHexagon nut type 3 !0Switch holder gasket !1Hexagon socket head cover cap screw qDetection plate !2Hexagon socket head cover cap screw !3Hexagon socket head cap screw !
9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.
VH Push button (Extended) VZM550-01-32R/B/G/Y Panel mounting hole VHS JIS symbol (Pilot exhaust port) 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 2-3.2 mounting hole 1.7 mm O.T. 6.5 mm T.T.
7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals.
7.15 x 3.75 x 1.7 P-5 SO-015-16 P-7 SO-010-16 Nickel plated REC CX M2L040-07B82108 SO-010-24 M2L032-07B82107 SO-010-21 M2L025-07B82106 SO-010-20 CY 28 x 30 x 1 22.2 x 24 x 0.9 17.6 x 19.4 x 0.9 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals.