VP3145/3165/3185

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Model: 42 (Dual AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: w/o Bracket, DIN Rail Bracket for Controller &

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Toggle Type Air Gripper

port Rc (G , NPT ) 1 8 1 8 1 8 Finger opening port O 34 S 7.5 30 20 4 x M6 x 1 bottom hole dia. 5.1 through Thread for mounting attachment MHT2-40DZ 2 x M8 x 1.25 thread depth 12 Mounting thread 20 40 4 x M6 x 1 thread depth 10 Mounting thread 18 37 48 10 4 x M8 x 1.25 thread depth 10 Mounting thread (Both sides) 7 7 Open 27 Closed 3 40 0.2 96 82 52 5 24 60 74 40 0.2 29 54.5 (136.5) 42

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Stroke A Stroke B Bore size [mm] L8 ZZ NA NB GC 32 198 294 67.8 10 36 40 220 328 75.2 10 38 ZZ + Stroke (A + B) L8 + Stroke (A + B) NA GC NB 50 222 360 74 10 38 63 252 390 87.2 10 42 80 270 442 90.8 14 46 100 290 472 99.8 14 50 151 Made to Order CP96 Series Symbol -XC11 Dual Stroke Cylinder/Single Rod Type 5 Two cylinders can be integrated by connecting them in line, and the cylinder stroke

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

PF2D

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

Vacuum Equipment

49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.

！ Contact our sales office for delivery dates and prices as this is a special model. SP112X-012E P: PZ P.G.Information (Specialized Product) SMC CORPORATION Power Clamp Cylinder：φ25 4-14-1,SOTO-KANDA, CHIYODA-KU,

[Clamp Cylinder Body Dimensions] Right type Center type Left type 24H7 through 26.5 through CKZ 25 42 * 781EL R Model Arm position Weight kg CKZ25-42A781EL-R Center 0.23Kg CKZ25-42B781EL-R Right 0.23Kg CKZ25-42C781EL-R Left 0.23Kg !

Rotary Table/

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 100h9 101 102 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 116h9 118h9 119 120 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

17

XX MY1 HT P (Hexagon socket head taper plug) P (Port) MY1 W (Hexagon socket head taper plug) 2 x 2 x J depth K VV ZZ ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable