Modular F.R.L. Unit

AFM40, AFD40 AWM40, AWD40 E400-03 3/8 32 36 36 E400-04 1/2 E400-06 3/4 E500-06 3/4 32 40 44 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E600-06 3/4 35 48 53 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 E600-10 1 Notes) in model numbers indicates a thread type.

JXCx-OMT0030CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

Fluoropolymer Fittings Hyper Fittings LQ1 Series

" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/8" x 0.086" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 3/4" x 5/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" Port size Port

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 7 6 5 4 3 2 1 0 1 0-7 All clear output Setting value 00 0 0 0 0 0 0 0 0 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 15 14 13 12 11 10 9 8 2 8-15 All hold last state Setting value FF 1 1 1 1 1 1 1 1 00 0 0 0 0 0 0 0 0 Output No. 23 22 21 20 19 18 17 16 23 22 21 20 19 18 17 16 3 16-23 All force output Setting value

CRB2/CRBU2/CRB1

Y (mm) 10 3 Y1 2 to 8 Size D1 L1 max. X 15 Y1.5 3 to 9 3 to 4 C1 C2 Y = L2 = L1= 10 3 X1 2 to 14 20 Y1.5 3 to 10 3 to 5 15 X1.5 3 to 18 3 to 4 D2 = 30 Y2 3 to 13 3 to 6 C2 = C X = 20 X1.5 3 to 20 3 to 5 40 Y4.5 6 to 15 3 to 8 30 X2 3 to 22 3 to 6 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male threads.

VQ5000

(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 3(R2) 5(R1) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Sensor Monitor

Measurement mode (Initial setting is completed) Perform the setting with the 3 step setting mode, simple setting mode and function selection mode. -20No.PS-OMU0012-C 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps. Use this mode if the product is to be used straight away, after changing only the set values.

I

Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry 3m lead W I R I N G S P E C I F I C AT I O N S L Grommet Entry 3m Lead 0.6m Courtesy of Steven Engineering, Inc. !

HRX-OM-W058

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

HRX-OM-X027

Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation and wiring of power supply cable . 3-10 3.3.4 Wiring of remote operation

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(common EXH type) 3 R 1(P) 40.3 4(A) 2(B) 03: 3/8 04: 1/2 3(R') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type 34 Base Mounted Type Series VQ5000 Dimensions (mm) 1in 25.4mm Optional Manifold Parts 179 (plug-in type) 133 (plug lead type) Throttle valve spacer 32 16 VVQ5000-20A-1 (plug-in type) VVQ5000-20A-5 (plug lead type) 3 5 1(P) 4(A) A throttle valve spacer is mounted on a manifold

Speed Controller with One-touch Fittings Series AS In-line Type 1

Applicable cylinder bore size (mm) Model Metric size Inch size 1 8" 3.2 4 6 8 10 12 5 32 " 3 16 " 1 4" 5 16 " 3 8" 1 2" AS1001F 6,10, 16, 20 AS2001F 20, 25, 32 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" AS2051F 20, 25, 32, 40 AS3001F 40, 50, 63 AS4001F

Safety Instructions

Viscosity according to ISO Grade 32 Classification of viscosity (cst) (40C) Turbine oil P-32 Idemitsu Kosan Co.,Ltd. Caution Turbine oil 32 Nippon Mitsubishi Oil Corp. Cosmo turbine 32 Cosmo Oil Co.,Ltd. Series LV Kyodo turbine 32 Japan Energy Corp. Turbine oil 32 Kygnus Oil Co. 1.

JXCx-OMT0062

. 32 (3) Example circuit 3 Motor power shutdown . 33 7.

Air Fittings Fitting Series For Special Environment

9 3 ( 5 . 0 6 4 2 . 1 ) 5 . 1 3 ( 4 5 . 1 ) 9 3 ( 4 9 . 0 ) 4 2 ( 5 3 . 0 ) 9 ( 7 . 9 2 4 / 1 S 5 3 3 1 L R K 1 1 / 6 1 ) 6 4 . 7 1 ( 4 0 . 1 ) 5 . 6 2 ( 7 6 . 0 ) 7 1 ( 2 2 . 1 ) 1 3 ( 8 / 3 S 6 3 3 1 L R K 2 3 . 1 ) 5 . 3 3 ( 1 6 . 1 ) 1 4 ( 8 3 . 0 ) 6 . 9 ( 2 / 1 7 . 7 3 2 / 1 S 7 3 3 1 L R K 7/8 ) 3 2 . 2 2 ( 8 4 . 1 ) 5 . 7 3 ( 7 6 . 1 ) 5 . 2 4 ( 7 . 3 6 Note: Fitting cover ordered

1

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

New

35 43 45 37 41 46 48 13.5 Electrical entry Grommet Grommet (with surge voltage suppressor) DIN terminal Port size P Model Q R Q R Q R S 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 29.5 29.5 32 32 63.5 (70) 68.5 (74.5) 76.5 (83) 79.5 (85) 32.5 32.5 35 35 50 (56.5) 55 (61) 63 (69.5) 66 (71.5) 67 67 69.5 69.5 55.5 (62) 60.5 (66.5) 68.5 (75) 71.5 (77) 55 55 57.5 57.5 ( ) are the dimensions