Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ Tighten them with the cross recessed round head tapping screw 13 . 6. Mount the tube gasket 9 to the right cover 2 to mount to the body 1 . Tighten them with the hexagon socket head cap screw with washers 12 . 17 15 3 10 14 26 11 5 12 19 9 12 14 1 11 26 4 2 6 15 Cushion seal 4 Direction of the shaft(key) 38 - 7.
No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.
6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).
Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.
If this occurs, stabilize the ambient temperature and fluid temperature properly. -11- 6.
Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8. Assembly drawing 14 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
Installation example n,m L 0 1 2 3 4 5 6 7 8 9 10 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 n,m L 11 12 13 14 15 16 L1 160.5 171 181.5 192 202.5 213 L2 [mm] : L1 shows the dimensions of the VQC1000 series solenoid valve.
Power supply connector cable For details, refer to subsection "Wiring" (page 10) of section "EX500 GW unit" in this manual. 6. Output cable For details, refer to subsection "Wiring" (page 46) of section "EX9 series General Purpose Output Black " in this manual. -59No.EX##-OMO0019 7.
Construction and Dimensions --10 6. Period and Scope of Warranty 12 7. Parts Replacement Procedure 13 1 XL-OMV0016 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
Turn on the power switch to fill the piping with the fluid. 6.
If this setting is not necessary, press the and buttons simultaneously for 1 second or longer. -32No.PS-OMM0005-J
[F 6] Fine adjustment of display value This function is used to manually perform fine adjustment of the displayed pressure. It is adjustable within the range 5%R.D.
The ionizer generates ion at the preset frequency. 0: 1Hz 1: 3Hz 2: 5Hz 3: 10H 4: 15Hz 5: 20Hz 6: 30Hz 7: 60Hz Operation with pulse + Ion Ion (e.g.) Charged workpiece: Charged in negative Static neutralization is completed (6) Wiring of Power supply cable Connect the special power supply cable to the unit.
The valve may jump out depending on the amount of air pressure. 2-6.
6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.
Note 6) Due to the softness of polyurethane tubing, it may fold when being inserted.
6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.
76 94 88 14 4 10.4 10.4
(Refer to p.1.1-6 for further information on specifications.) Ass'y part No.
Note) Cable (7) external: 6 to 8 mm 3. Assembly 1) Passing through the cable (7), the cable gland (4), plain washer (5), and rubber seal (6), housing (2) in this order, and then connect with the terminal block (3). After that, set the terminal block (3) on the housing (2).