MXH CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 (mm) Stroke (mm) NS LT J LA LB 5 14 10 49 4 10 49 14 10 4 15 59 24 4 20 20 24 59 4 20 25 30 30 69 4 30 69 30 30 4 40 79 45 20 6 20 50 55 89 6 25 25 60 60 30 30 99
C filter. 1 to 99 addresses 1 3 Derivative Time Flow rate is zero. 2. Clean the filter, then put it back to the product. Setting Sets the derivative time used for PID control. Set with [] or [] key Set with [] or 0 to 3600 sec. [] key PV If 0 is set, derivative control 4 0sec DI2 The pump breaks. Check the pump operation. If the pump breaks, need to be replaced.
thread depth 6 40 8-M4 x 0.7 thread depth 4 Mounting thread Attachment mounting thread Auto Switch Mounting Groove Dimensions 52 24 2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 3 7.5 7.5 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 12-3-21 22 Series MHF2 Dimensions MHF2-20D1 66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99
NS 14 14 24 24 30 30 45 55 60 LT 49 49 59 59 69 69 79 89 99 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 25 MXH Series Dimensions: 16 LT 16 24 14 LA LB J x M4 x 0.7 Depth 6 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 4 x M4 x 0.7 Depth 10 2 x M5 x 0.8
Refer to page 100 for part numbers. 99 Series LJ1 Options Non-standard Motor Driver Regenerative Absorption Unit/Regenerative Resistor T-nuts for mounting electric actuators Use T-nuts for T-slot mounting of an actuator. When mounting by means of T-nuts alone, the quantity of nuts indicated below should be used as a minimum.
carrying direction 4-N through 8-O recessed area L CZ CT CT Y V U Conveyor lower limit position CD T R Stroke H B 2-P D QA FT A GA Rear pressure port Front pressure port QB 2-Plug WB GB E W (Width across corners I) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99
1/4 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 30 35 35 40 40 MXP MG With rod boot e 43 52 52 65 65 Without rod boot H 51 58 58 71 72 Bore (mm) MGP KA LZ M MM N P PG PH PL PW S W K h 59 66 66 80 81 ZZ 223 245 262 305 324 ZZ 215 237 254 296 315 f 11.2 11.2 11.2 12.5 14 l l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 40 50 63 80 100 14 18 18 22 26 71 80 99
Model Model ZPT02U-0-A8 ZPT2004U ZPT10UT 2 2 10 11 2.6 1.2 1 1.2 0.3 4 2.6 4.6 ZPT04U-0-A8 ZPT3507U ZPT13UT 4 3.5 13 14 4.8 1.8 1.6 0.8 0.5 7 4.3 7.8 1.5 ZPT06U-0-A8 ZPT4010U ZPT16UT 6 4 16 17 7 2 0.8 10 5 11 2.5 2.5 ZPT10CT 10 11 0.8 ZPT08U-0-A8 8 9 1 ZPT13CT 13 14 Dimensions by Stroke 1 ZPT16CT 16 17 F D E G: 4 G: 6 Model ZPT 6-0-A8 18 15 60 61 ZPT10-0-A8 23 93 94 ZPT15-0-A8 28 43 98 99
15.12.1 .99 15.12.2 .100 15.12.3 CC-Link .100 15.12.4 .101 15.12.5 .112 15 1 15 15 PA01 1 LECSC14 15.1 15.1.1 1(RYnA)8(RY(n2)5)0254 1(RY(n2)C)3(RY(n 2)E)18 2 15.1.2 () CC-Link CC-Link(1)31 CC-Link(2)255 CC-Link(2) () / JOG (RYn1)ON (RYn1)OFF JOG CC-Link DOG DOG DOG DOG 15 2 15 15.1.3 1 () 2255 15.7.2 2 () 2255 15.7.3 1.
M 33 33 36 36 L 72.5 80.5 92.5 99 M 51.5 51.5 54 54 L 73.5 81.5 93.5 100 M 68.5 68.5 71 71 N 56.5 56.5 59 59 L 72.5 80.5 92.5 99 M 103.5 103.5 106 106 N 72.5 72.5 75 75 1/4, 3/8 1/2 3/4 1/1 28 35 43 45 7.5 8.5 9 9 5.5 6.5 6.5 6.5 26 33 40 45.5 1.6 2.3 2.6 2.6 14 17 22 22 67 75 87 92 52 60 68 73 77.5 85.5 97.5 104 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 42 Series VXE21/22/23 For Air/Water/Oil
117 136 154 50 22 53.5 94 63 135 L1 Rod end nut 135 63 75, 100 MLU Head Side flange style: CLQG/CDLQG ML1C DFV M -X Head Side Flange Style 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range 20FD FT FV FX FZ G L L1 M B A A B 91 36 10 to 50 63 46 101 9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99
When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
.: 10 (A, B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 141.1 (3 position) 128.6 (3 position) 2 stations 61 49 20 stations 403 391 3 80 68 4 99 87 5 118 106 6 137 125 7 156 144 8 175 163 9 194 182 10 213 201 11 232 220 12 251 239 13 270 258 14 289 277 15 308 296 16 327 315 17 346 334 18 365 353 19 384 372 Stations n L1 L2 1-6-63 Series SX3000
(DI control kit) M Various alarm displays (Refer to page 117.) 99 Electrical Resistivity Control Communications DI control kit (Refer to Options on page 118.) Electrical resistivity of circulating fluid (ethylene glycol aqueous solution and deionized water) can be controlled.
When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
bracket E G H S Z LL Basic type Dimensions Hexagon nut With cap Model B h C E LL Z D 6 H 46.8 LL 40.8 S MM 5 G 7 K RJ0806U RJ1007U RJ1412U RJ2015U RJ2725U RJ0806 RJ1007 RJ1412 RJ2015 RJ2725 2.8 M8 x 1.0 12 4 6.8 55.3 8.5 13.9 7 52.3 45.3 7 9 3 M10 x 1.0 14 4 8.7 62.3 10 16.2 12 79.1 67.1 8 12 5 M14 x 1.5 19 6 12 92.6 13.5 21.9 15 88.2 73.2 10 17 6 M20 x 1.5 27 6 18 105.2 17 31.2 25 124 99