Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: Standard, Attachment: STV (S + T + V), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 02 (1/4), Option: Standard, Attachment: KST (K + S + T), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 30, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 3/8, Option: Standard, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: Standard

.: T-Branch Type, Valve Stations: 8 Stations, SUP, EXH Block Mounting: D Side 1~10 Stations, SUP, EXH Block Fitting Spec: -, DIN Rail Length: -

Accuracy: High Precision Type, Size: 32, Bearing Type: Ball Bushing Bearing, Motor Mounting Position: In-line, Motor Type: Mounting Type T, Lead Screw: B [LEYG25, 6mm; LEYG32, 8mm, (10)], Stroke: 200mm, Guide Option: -

Protocol: DeviceNetâ„¢, Mounting: Screw Mounting, Cable Connector: T-branch Type, Actuator: LER, Table Accuracy: High Precision Type, Body Size: 50, Max Rotating Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: -

Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/8, Option: Standard, Attachment: K + S + T + V, Semi-Standard 1: 3 + C, Semi-Standard 2: Standard

Vacuum Inlet Direction: T (Vertical), Pad Diameter: 20 (ø20), Pad Form: B (Bellows Type), Pad Material: FS (FS61), Buffer Specification: JB (Rotating, w/Bushing), Buffer Stroke: 10, Mesh Filter: MF (with Mesh Filter)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: R (External Pilot), Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 12 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)