Series VS

H 20.5 I 26.5 J 20.5 K 30.5 L 58.5 M 22 N 45.5 O 52 P 81 Q 49 R 18 S 5.5 T SIZE 1 SIZE 2 SIZE 3 189.5 125 9 52 52.5 64.5 96.5 112 26 34 26 37 64.5 31.5 58.5 67.5 97.5 58.5 20.5 3 41 52 41 52 92 36 69 82.5 121 74 28 4 234.5 142.5 13 77.5 79.5 92 108 123.5 CC 188.5 199 244 SIZE 3 SIZE 2 57.5 1.5 U V 14 25 43 W X 2 42 Y Z 133 AA BB SIZE 1 1 73 56 35 53 2 20 150.5 4 68.5 71 30 45 2 20 175.5

Digital Flow Switch (Integrated display type)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

EXxx-OMK0006

The resistance of one connector should be in the range of 2.5 to 10 m. -11No.EX-OMK0006-C Power supply connector M12 male 5 pins reverse key type Pin No. Description Function 1 SV 24 V +24 V for solenoid valve. 2 SV 0 V 0 V for solenoid valve 3 SW 24 V +24 V for input block 4 SW 0 V 0 V for input block 5 FE Functional earth (Example of connection cable: EX9-AC050-1 etc.)

Digital Flow Monitor

4 mA 4.16 mA 20 mA E F G Voltage output (0 to 10 V) 1 0 V 0.10 V 10 V 1: The analogue output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M plug connector 4 For type W, DC voltage is only available. For connector cable of M8 connector, refer to page 90.

Return Filter FH100 Series

Element Relief valve P M 0 1 Paper Micromesh With relief valve None Hydraulic fluid 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

Air cushion V*1 *1 The symbol is Nil for no magnet. *1 Except 8 Applicable mounting bracket Cushion Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Nil Rubber bumper (Standard) C Air cushion Built-in magnet N V V V V V E V V V V F V V V Y V V V Nil None D Built-in magnet Rubber bumper Rod boot (20, 25 only) Nil Without

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

HRX-OM-R039

Size Rated Rated Rated (to be onnected of leak current voltage current to the user's current equipment) Plug with ground HRSE012-A-10 3 cores x terminal (JIS C8303 Plug for the eceptacle for 15A and 125 V with dipole grounding electrodes) HRSE012-A-10-T 14AWG Shared 15mA 1-phase HRSE018-A-10 (3 cores x 2.0mm2) with 100 100V AC 15A 15A or V and 200 V (50/60Hz) 30mA (including HRSE018-A-10-

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

Actuator Position Sensor

SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4000 BDC3 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16384) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4001 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC3 (16385) 3 R/W Hysteresis bit(0) 16 bit 10 Y 1 to 400 SetPoint1 bit(16) 16 bit 3 Y 3 1 R/W 0x4002 BDC4 2 R/W SetPoint2 bit(0) 16 bit 3 Y 3 (16386) Logic bit(24) 8 bit 0 Y 4 1 R/W 0x4003 2 R/W Mode bit(16) 8 bit 0 Y 5 BDC4 (

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

rep-filter-e

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

Industrial Filters Replacement Procedure

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

Micro-Mist Separator with Prefilter Series AMH

-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

Vacuum Equipment

capacity V = 50 (l) Max. adsorption flow Q (l/min (ANR)) Work Tubing O.D.