20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

Precision Clean Regulator

Parts cleaning All wetted parts degrease washing Note) At set pressure of 0.2 MPa 871 SRP Series Flow Rate Characteristics (Representative value) Fluid: Air SRP1101-M5 Conditions/Inlet pressure: 0.5 MPa SRP1-M5 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60

20 to 40 C: FluorinertTM20 to 90 C: FluorinertTMFC-3283/GALDEN? HT135FC-40/GALDEN? HT200?20 to 9010(at 20 C)5.0 (at 20 C)?

EX500-GEN2_eng

IP65 Enclosure rating 8 8 2 8 2 2 3 3 7 7 3 7 Operation: -10 to 50 oC, Storage: -20 to 60 oC (No condensation or freezing) Ambient temperature range 4 4 6 4 6 6 1 2 3 4 5 5 5 Operation, Storage: 35 to 85%RH (No condensation) Operating humidity range L IP address No corrosive gas Operating atmosphere 48 52 Setting 550 g Weight Description After maintenance is complete, perform appropriate

Solid State Vacuum Regulator Series ITV2090/2091

19 R3.5 25 7 36 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 3

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UN, NEW SY3000 MFLD, FITTING

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MANIFOLD, VALVE, NEW SY3000 MFLD, UN, NEW SY3000 MFLD, FITTING

Solid State Vacuum Regulator

19 R3.5 n36 25 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc 1/4 ATM port, OUT port (7) 36 SMC Pneumatics, Inc.

PSxx-OMG0005CN

PSE560 PSE561 PSE563 PSE564 01 MPa 0-101 kPa -100100 kPa 0500 kPa -0.10 MPa 10.10 kPa -500 kPa 1.5MPa 500 kPa 500 kPa 750 kPa PSE56PSE56--28 SUS316L DC1224 V10-10 10 mA DC15 V 420 mA () DC0.61 V () () 500 (24 V ) 100 (12 V ) 1 k (25 ) 1F.S.() 3F.S.() 0.5F.S. 0.2F.S. 0.3F.S.

20 to 908.0 (at 20 C)3.3 (at 20 C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.713/14Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?

20 to 9010(at 20 C)4.5 (at 20 C)?