Table of Contents

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Environment

B2 LECSB2/Pulse input (Absolute encoder) 200 V to 230 V C2 LECSC2/CC-Link (Absolute encoder) 200 V to 230 V !

VDW Series

VDW 2 0 1 B 1 Series Lead wire length OUT (2) 1 2 3 10 20, 200 30, 300 300mm 600mm Nil L1 Note) Note) Type L1 is optional. (1) IN 2 port valve Voltage Type Note 1) Maximum operating pressure differential MPa (psi) 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size mm B C1 C2 20, 200 10, 30 300 Model Pressure port 2 Note 1) Pressure port 1 1 0.4 (58) 0.9 (130.5) VDW10 1.6 0.2

Digital Pressure Switch

Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1 x 10-5Pa m3/s 1 x 10

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) P = 10.5 13.5 46.9 18.3 11.8 14.1 8.4 8.6 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 10 19.7 24.6 23 5 3 E 5 3 E 3 5 E 3 5 E 43.2 43 56.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 C2 C2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" PE PE X X C1 C1 2 x M12 One-touch fitting [PE: Pilot EXH port] Applicable tubing

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218

Smooth Cylinder/Low Speed Cylinder

(mm) B D FL FD K KA N NA NN P S A B1 C2 H2 I B2 E F FT MM Z AL FX ZZ FY FZ G H H1 Bore size (mm) 0 0.033 20 15.5 13 26 30 10.5 5 8 M8 x 1.25 M20 x 1.5 116 34 8 7 5 6 15 24 62 18 28 13 4 37 60 75 8 41 20 0 0.033 25 33.5 5.5 M10 x 1.25 19.5 17 32 37 10.5 6 8 M26 x 1.5 120 40 10 7 8 15 30 62 22 13 4 41 60 75 8 45 26 0 0.033 32 34.5 37.5 5.5 M10 x 1.25 19.5 17 32 37 10.5 6 8 M26 x 1.5 122

Compact Vacuum Unit Ejector/ Vacuum Pump System

ZB-OM00201-B (10) Vacuum (V) port Note10) Note 11) C2 Straight type2 One-touch tube fitting Metric size C4 Straight type 4 One-touch tube fitting N1 Straight type 1/8 One-touch tube fitting Inch size N3 Straight type 5/32 One-touch tube fitting L2 Elbow type 2 One-touch tube fitting Metric size L4 Elbow type 4 One-touch tube fitting LN1 Elbow type 1/8 One-touch tube fitting Inch size

JSY1000/3000/5000 Series (Non Plug-in)

KQSY10-C4-X1336 (JSY1000) KQSY11-C6-X1336 (JSY1000) KQSY30-C8-X1336 (JSY3000) KQSY50-C12-X1336 (JSY5000) * It is not possible to replace C2 or C4 fittings with C6 fittings for the JSY1000 series. * Refer to page 18 for One-touch fitting, clip, and port plate part numbers. 15 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 7 Be sure to read this before handling.

Digital Pressure Switch ( compatible)

. -93No.PS-OMX0002-A Piping/weight specifications Product No. 02(L) N02(L) F02(L) C01(L) A2(L) B2(L) Port size R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 fluid contact Materials in part Pressure-sensing part Pressure sensor: SUS630, Fitting: SUS304 Body (Rear piping) 51 g 51 g 48 g 47 g 54 g 46 g Weight Body (Bottom piping) 77 g 78 g 74 g 65 g 81 g 72 g Lead wire with connector +39 g Leakage 1

HRX-OM-X084

Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown Black (CN6) 3/3 1 3 Brown 37 Refrigerator suctionT2 2 4 Black Blue PCB1 Blue 38 Circulating fluid outlet Blue 39 Brown 1 9 Brown (CN1) 2/2 (CN5) 40 Blue 2 13 (CN4) (CN3) 1 2 1 3 11 12 1 3 PCB2 Blue 3 15 PS1 Brown 27 Black Black 20 Blue IFAN Refrigerant high pressure C1 Blue 10 Brown 1 32 Yellow/Green White Black 2 C2

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

Electric Actuator

Cable type 5, 6, 7 Cable length [m] 5, 8 Driver type 5 I/O connector Nil Nil Power supply voltage (V) Compatible drivers Nil Without connector Without cable Without cable H S R 2 5 With connector Nil Without driver Standard cable 2 m 5 m A1 A2 B1 B2 C1 C2 S1 S2 LECSA1-S; LECSA2-S; LECSB1-S; LECSB2-S; LECSC1-S; LECSC2-S; LECSS1-S; LECSS2-S; 100 to 120 200 to 230 100 to 120 200 to 230 100

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

AC Servo Motor Driver

Setting retry flag M16 SET Retry counter Retry ABS transfer mode OFF wait timer C2 D7 Retry counter ABS transfer retry control M15 RST Setting ABS transfer retry start flag M16 T2 K1 Retry waiting timer (100ms) Retry flag set T2 Resetting retry flag M16 RST Retry waiting timer M9039 Saving received shift data D110 A0 DMOV PC RUN END 14 46 14.

CV/MVGQ

30 M26 x 1.5 62 20 8 25 135 55 15 M10 x 1.25 34.5 M26 x 1.5 64 20 8 25 137 55 15 42.5 M32 x 2 88 23 10 27 171 75 M14 x 1.5 21.5 Rod Side Flange Style (F) Bore size Stroke CVM5F Manual override Width across flats B2 Width across flats B1 Mounting hole Width across flats NA In the case of 40 Mounting hole S + Stroke ZZ + Stroke In the case of 20 to 32 Eh8 B1 FT FX FY FZ H H1 A AL B B2 C2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MXS MXQ Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front trunnion: CBM2U N L MXF TY TD 0.025 0.051 MXW MXP TT ZZ + Stroke Z TT TX MG TZ Z + Stroke ZZ + Stroke MGP (mm) Axial foot Trunnion Clevis Flange MGQ Bore (mm) Stroke range Stroke range Stroke range Stroke range Z ZZ Z CD CX CZ B LC LD LT LX LZ X Y Z ZZ FD FT FX FY FZ L U Z ZZ TD TT TX TY TZ LH LS B C2

LEKF-OMZ0035

Grease application (Seal band part) Motor option Nil With Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable C2

Electric Slide Table / High Precision Type 《 AC servo motor 》

C2 LECSC2T S2 LECSS2T N2 LECSN2T 92 LECSN2T-9 E2 LECSN2T-E P2 LECSN2T-P -4- 1.1.2 Specification LESYH*(D,R,L)*S2/S3 Motor type S2/S3 Model LESYH16*S2 LESYH25R/LS3 LESYH25DS3 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N] (Set value: 15 to 30%) *1 65 to 131 127 to 255 79 to 157 154 to 308 98 to 197 192 to

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front trunnion: CBM2U N L MGP MGQ MGG MGC MGF (mm) Clevis Flange Axial foot Trunnion Bore (mm) Stroke range Stroke range Stroke range Stroke range CY1 Z ZZ Z LH LS B C2