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Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Note 1) The same bracket is used for VCS3 and VCS4 (port size 1/2). 17-2-44 7 Series VCS Direct Operated 2 Port Solenoid Valve For Steam Dimensions Grommet:G Conduit: C Q 300 F D 280 D Q F VC C G1/2 C R R VDW VQ E E B A H 2-P Port size VX2 A B H 2-P 2-M Thread depth N 2-M Thread depth N VX Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

t0 I Recommended Circuits I q+"'"' A,.r rr.nv . . . 1 1 I I I Construction/Parts List .12 l J l / 18-20 I nuto Switch Specif ications . .21 I nuto Switch Circuit Diagrams. .22 I Ruto Switch Dimensions/Operating Range .23 I Ruto Switch Connection . .24 I Ruto Switch MountinS. . .25 r"-"--'-""' I Annaccnriac I Pranar riinne .26 r "-"-" tri*,t l x}$x:? xxxs !

igs 3 wiE slslem lwhen Dower source lor slrlbh and load is commod) Contact capacity a Loads overthe minimum contactcapacity of the switch should not be used. I t r i : : O _ _ a r ! P ! ! : o : L o a d F = I Ll|acxo re 3 riire syslom (Wren pol9l sqJme lor swioh and load s nol cofimom) Fled ^ | | ,.,",.-" a-a ao | | :".'*: ' "l Load l *lrlii + | | t r a ! ! !

igs 3 wiE slslem lwhen Dower source lor slrlbh and load is commod) Contact capacity a Loads overthe minimum contactcapacity of the switch should not be used. I t r i : : O _ _ a r ! P ! ! : o : L o a d F = I Ll|acxo re 3 riire syslom (Wren pol9l sqJme lor swioh and load s nol cofimom) Fled ^ | | ,.,",.-" a-a ao | | :".'*: ' "l Load l *lrlii + | | t r a ! ! !

igs 3 wiE slslem lwhen Dower source lor slrlbh and load is commod) Contact capacity a Loads overthe minimum contactcapacity of the switch should not be used. I t r i : : O _ _ a r ! P ! ! : o : L o a d F = I Ll|acxo re 3 riire syslom (Wren pol9l sqJme lor swioh and load s nol cofimom) Fled ^ | | ,.,",.-" a-a ao | | :".'*: ' "l Load l *lrlii + | | t r a ! ! !

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

See page 44 for more information regarding seal replacement.Note) A grease pack (GR-R-010, 10g) is included in seal kits. Note) A grease pack (GR-R-010, 10g) is included in seal kits. 9 Stainless Steel Cylinder Series CG5-S Dimensions R V Basic type (B)/CG5BNS : With rubber bumper X165US inch rod option dimensional changes Dim.

AD37 AD48 AD47 Float type auto drain Note 5) Note 1) Assembly of a bracket and set nuts Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT. Please contact SMC regarding the connection thread NPT and pressure gauge supply for PSI unit specifications.

AD37 AD48 AD47 Float type auto drain Note 5) Note 1) Assembly of a bracket and set nuts Note 2) in part numbers for a round pressure gauge indicates a type of connection thread. No indication is necessary for R; however, indicate N for NPT. Please contact SMC regarding the connection thread NPT and pressure gauge supply for PSI unit specifications.

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

Note 2) For LIN-A and LIN-I, Axis 1 to Axis 3 are based on interpolation. Do not perform a setting for Axis 4. -54No. JXC-OMT0002-C (4) CIR-R / CIR-L Area 1 Step No.

unit Components ZR1-SR3-28-A(a set of two threads) ZR1-SR3-68-A(a set of four threads) ZR1-SR3-72-A(a set of four threads) ZR1-SR3-73-A(a set of four threads) ZR1-SR3-77-A(a set of four threads) 9 [For ZSE30A spec.]

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Auto switch capable CA2 Construction CS1 CS2 q w e r t y u i o !0 !5 !6 !7 !8 !9 @0 @1 @2 @3 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts No.

Round plate (Including column) Position of rotational axis: Through the center Number of teeth = a (B) axis 1. Find the moment of inertia I for the rotation of shaft (B). r B 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teeth = b 5.

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 4.

0 n r Ro 18 tio ta or tio ta t f n r Ro fla an le ge ng of si +10 0 0 Ro 19 tat or io t f n r fla an gle ge sin of With external stopper For 90 For 180 Single flat Single flat 5 A A e ng ng ng le le ra ad ad t ju ju en st st m m m st en en ju t r t r ad an an gle ge ge An 5 5 B port A port B port A port 90 A 5 ng ge le an ad t r ju en st m 180 Note) The drawings show the rotation range