Series AK1000

Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression Material 4 4T 6T Code Body Brass Poppet Diaphragm Seat material B S SH Code Material PCTFE (Standard) Vespel 3) PEEK 316 SS 316 SS No code VS PK 316 SS Hastelloy C-22 Hastelloy C-22 Ports 3) Not available with SH material.

M-E05-1-LQ1

4 4-13 LQ1-4N13 LQ1-4B13 8 x 6 LQ1E5A-T-R8 5 5-19 LQ1-5N19 LQ1-5B19 6 x 4 LQ1E6A-T-R1 6 6-25 LQ1-6N25 LQ1-6B25 12 x 10 5-17 A Tubing Extension Union Tee Reducing LQ1T-T-R B side B side A side C side C side A side T1 type T2 type Metric size Model Size A side B side C side Insert pin/Name plate symbol Part no.

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

Cylinder with Lock Series CLS

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

VCW

OUT (2) 2 Port size (1) IN Port size 1/8 (6A) Symbol 01 02 03 04 06 Class 3 Class 2 Class 4 Voltage 1/4 (8A) 3/8 (10A) 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC 1/2 (15A) 3/4 (20A) Orifice size Orifice size (mm) Class 3 Class 2 Class 4 Symbol 2 3 4 5 7 10 Please consult with SMC regarding other voltages. 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Note) Note

LEC-OM069xx

5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1

Table of Contents

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(B) 2 VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list

Mist Separator

NPT C2SF-2(Z)-A NPT C2SFN-2J(Z)-A -11- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: Semi-standard: C Piping port Piping port thread ty pe (4) Part No. (4) Part No. thread ty pe Rc Rc AD27-D AD27-C-D G G NPT AD27(-Z)-D NPT AD27-C(Z)-D Appearance and part No.

Micro Mist Separator

NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -11- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: C Semi-standard: Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc AD27-C-D AD27-D G G NPT AD27-C(Z)-D NPT AD27(-Z)-D Appearance and part No.

3

Grommet 10 B 3/8 C Stainless steel 1/4 D 3/8 3 10A N.C.

JXCx-OMU0004

A B C A B C A B C 14 27 51 63 126 232 80 156 296 156 298 570 26 50.5 96 92.5 182 342 134. 263 501. 218 425 814 5 5 [N] 38 74 141 122 238 452 189 370 707 283 553 1058 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 *20%F.S.

Water-cooledThermo-chiller

(75 mm) or less Plate Facility water inlet Rc3/4 (with plug) Circulating fluid outlet Rc3/4 (with plug) REMOTE START/STOP RUN Handle ALARM RESET SEL ENT Circulating fluid fill port Circulating fluid return port for DI filter Note) E S O L C SMC N E P O Circulating fluid level gauge Rc1/4 (with plug) Circulating fluid return port Rc3/4 (with plug) C Ventilation (expiration) Tank drain port

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

80

C R E (AC type) [mm] B B1 2 x P Port size Model One-touch fitting P B B1 C D E F VDW1 3.2, 4 31.7 17.1 46.1 15 9.5 11 VDW2 4, 6 35.9 19.8 52.9 20 10.4 13.5 Mounting bracket dimensions Electrical entry Model One-touch fitting P U W X Y Grommet Q R VDW1 3.2, 4 28 11 34 17 15.5 30.35 VDW2 4, 6 33 14 39 20 17 35 Port size M5/M6 Grommet 2 x 3.4 Mounting hole W Y X U D 300 Q F Full wave rectifier

Large Size Vacuum Module: Series ZR

(Single unit) ZR1-RV1-4 1pc. (Function plate) ZR1-R1-4 1pc.

Refrigerated Air dryer Series IDU/IDF

D A B C Model IDU6D IDU8D Port size R 1/2 710 760 240 75 560 551 R 3/4 810 860 : Power source 220 to 240VAC 4 Refrigerant R22, R134a Series IDU 11D, 11C, 15C, 15C1, 22C, 22C1, 37C, 37C1, 55C, 75C Medium How to Order Voltage Model Options (No options for standard specification models) 11D 11C 15C 22C 22C1 37C 37C1 55C 75C 1 2 3 4 6 C E H L M R S T IDU Voltage 1 Single phase 100VAC (50Hz)

Compact Cylinder

4 pcs. 20 OA (4 positions) (The same four-place size) K 2 x 4 x RA (RB) M L B + Stroke E A + Stroke 25 Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 13 13 5 5 14 14 10 12 M8 x 1.25 M8 x 1.25 8 10 22 22 16 16 20 25 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q

Thermo-con

1.9 (49) Air Air RS-232C ALARM E R T T N E K I ETL LISTED CONFORMS TO M C AC EXT.SENSOR CERTIFIED TO UL STD 60601-1 US C D L I E S T 3054524 Circulating fluid outlet Rc1/4 CAN/CSA STD C22.2 NO.601.1 THERMO-CON HEC002-A5B-F MODEL No.

Air Filter

Standard Specifications Model AF20-D AF30-D AF40-D AF40-06-D AF50-D AF60-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Fluid Air C (with no freezing) Ambient and fluid temperature -5 to 60 Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating 0.15 MPa N.C. 0.1 MPa pressure of auto 0.1 MPa N.O.