Compact Cylinder Series CQS

Cylinder model Mounting bolt size Mounting bolt size CQSKB12-5D -10D -15D -20D -25D -30D M3 x 25L x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 30L x 35L x 40L

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend CUJ Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model

Compact Cylinder

x 45L x 50L CQ-M6 x 55L x 65L CQ-M3 x 40L x 45L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 65L 5.5 6.1 8 8 10.5 10.5 9.5 9.5 9 9 7.5 7.5 12.5 12.5 44 Series CQ2 Dimensions 12 to 25/Spring Return Without Auto Switch Both ends tapped: CQ2A Both Ends Tapped (mm) Standard (Through-hole): CQ2B O1 thread R R Bore size (mm) O1 R 12 16

NCQ2/CQ2

CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L Cylinder model Mounting bolt part no.

CQS

3 contained in one kit, and can be ordered using the order number for each respective tube bore size. 2.2-12 Compact Cylinder/Standard: Double Acting Double Rod Series CQSW Mounting Bolt for CQSW Mounting bolt M3 X 30l X 35l X 40l X 45l X 50l X 55l M3 X 30l X 35l X 40l X 45l X 50l X 55l M5 X 35l X 40l X 45l X 50l Mounting bolt M5 X 55l X 60l X 65l X 70l X 75l X 80l M5 X 35l X 40l X 45l X

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

/min Flow rate measurement range Note 1) 0.25 to 4.5l/min 1.3 to 21.0l/min 2.5 to 45l/min Set flow rate range Note 1) 0.05l/min 0.1l/min 0.5l/min Minimum setting unit Note 1) Accumulated pulse flow rate exchange 0.05l/pulse 0.1l/pulse 0.5l/pulse value (Pulse width: 50ms) Note 1) Note 2) Real-time flow rate l/min, gal (US)/min l, gal (US) Display units Accumulated flow 0 to 9l Accumulated

Digital Flow Switches, Series PF2A, Series PF2W

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Set flow rate range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Minimum setting unit Note 1) 0.05l/min 0.1l/min 0.5l/min 1l/min Accumulated pulse flow rate exchange 0.05l/pulse 0.1l/pulse 0.5l/pulse

Compact Cylinder with Solenoid Valve/

C Example) Bolt M5 x 45L: 4 pcs.

Digital Flow Switches

Panel adapter B ZS-22-02 Specifications PF2W300/301 PF2W330/331 Model Flow rate measurement range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Set flow rate range Note 1) 0.35 to 4.5l/min 1.7 to 17.0l/min 3.5 to 45l/min 7 to 110l/min Minimum setting unit Note 1) 0.05l/min 0.1l/min 0.5l/min 1l/min Accumulated pulse flow rate exchange 0.05l/pulse 0.1l/pulse 0.5l/pulse

Compact Cylinder

D C Example) Bolt M5 x 45L: 4 pcs.

PAB-OM-K007

Specifications and how to order Specifications Model PAF5410 Main fluid suction / discharge port Rc, G, NPT 3/4, 3/4 tube piping, With nut Port size Driving air Supply / Exhaust port Rc, G, NPT 1/4 Body New PFA Diaphragm / Packing PTFE Material of wetted part Check valve New PFA, PTFE Discharge amount 5 to 45L/min Average discharge pressure 0 to 0.4MPa Pilot air consumption Max. 300L/min

Process Pump Series PA3000/5000/PAX1000 Series PB1000

PA3000: Max. 20l/min PA5000: Max. 45l/min Air exhaust port Switching valve Air supply port Air supply port 5 way valve Discharge port Discharge port Suction port Suction port Features 1 diaphragm pump for a wide variety of fluids Series PA/Double acting pump Process Pump Variations Model Action Discharge flow rate l/min Material Body Series Diaphragm PA30 PA50 PA313 PA513 FLUID OUT AIR

Process Pump Series PA3000/5000/PAX1000 Series PB1000

PA3000: Max. 20l/min (0.7SCFM) PA5000: Max. 45l/min (1.6SCFM) Air exhaust port Switching valve Air supply port Air supply port 5 way valve Discharge port Discharge port Suction port I Suction port diaphragm pump for a wide variety of fluids Series PA/Double acting pump Process Pump Variations Model Action Discharge flow rate l/min (SCFM) Material Body Series Diaphragm PA30 PA50 PA313 PA513

PF2D

Rated flow range of sensor Set flow rate range of sensor Sensor 4L/min 20L/min 40L/min 1.8L/min 0.4L/min Flow rate range 10L/min 0.4L/min 4L/min PF2D504 0.25L/min 4.5L/min 1.8L/min 20L/min PF2D520 1.3L/min 21L/min 4L/min 40L/min PF2D540 2.5L/min 45L/min Flow Rate Characteristics (Pressure Characteristics) PF2D504 PF2D520 PF2D540 0.040 0.035 0.030 0.035 0.030 0.025 Pressure loss [MPa] Pressure

PA3000/5000/PAX1000

PA3000: Max. 20l/min PA5000: Max. 45l/min Air exhaust port Switching valve Air supply port Air supply port 5 way valve Discharge port Discharge port Suction port Suction port Features 1 diaphragm pump for a wide variety of fluids Series PA/Double acting pump Process Pump Variations Model Action Discharge flow rate l/min Material Body Series Diaphragm PA30 PA50 PA313 PA513 FLUID OUT AIR SUP

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

Flow Sensor Series PFMV

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.