New

, T1 = 297 p5 K, 0.07 bar b $P b 0.14 bar.

High Purity Chemical Valve

Single type Suck back P P P TL/TIL A B A B Unit Single type Unit LQ3 Manifold (5 stations max.) A R P 3 port N.C. PA N.C.

Valve Single Unit

Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 SX7000: SS5X7-20Stations Grommet (G) 2n2-One-touch fittings (A, B port) 2n1-Rc 1/4 (A, B port) 6-Rc 1/4 L1 L2 Applicable tubing O.D.: 8 (Mounting hole) 4-4.5 10 (P, EA, EB port) 10 16.5 11.5 22.4 76.8 19.5 19 20.5 B A B A B A B A B A B A B A 20 20 EA EB P EB EA P 21 21 62.5 67.7 21 60 128.6 115.6 30 99.5 28.2

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

CRB2/CRBU2/CRB1

20 CDRB1BW 504 0.030 4 0.030 0 0 W 25 CDRB1BW 635 0.030 5 0.030 P 0 0 PORT 36 CDRB1BW 805 0.030 5 0.030 0 0 40 CDRB1BW1007 0.036 7 0.036 0 0 4-T S F CDRB1BW-SE, CDRB1BW-DE L E K Key length B port B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

2/3 Port Valve

and B port Supply pilot air higher than 0.25MPa to P1 port VNH VNH P1 P1 nozzle 1(P) 2(A) nozzle 1(P) 2(A) 3(B) 2 port valve Tank Coolant pump Tank Coolant pump For reducing load to pump, coolant liquid is returned form B port to tank in each time.

0.55

Pilot type (A) 2 (A) 2 Internal pilot 1 (P) 3 (R) 1 (P) 3 (R) (A) 2 (A) 2 o External pilot 2(A) 3(R) 1 (P) 3 (R) 1 (P) 3 (R) !0 Strainer X X X Component Parts 1(P) No.

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

AC Servo Motor Driver (CC-Link Type ）

A L 3 7 # 0 0 P B 1 0 P B 1 1 P B 1 2 P B 1 6 S p d 0 0 1 Point table error details For the point table No.1 speed data error Point table No. with error Error item Spd: speed Acc: acceleration time constant Dec: deceleration time constant 15 113 16. SERVO MOTOR 16.

Prevents Micro-Bubbles

PA A B Suck back (single type) Suck back (unit type) P P P A A B B With indicator Description Material Parts list No.

Sine Rodless Cylinder Series REA/REB

thread length E TC X F WP WP GW GP QW PW 4 x LD D Piping port P Operating direction A 7 W K G Piping port P Operating direction B Piping port P (Plug) Operating direction B HS CR With switch rail Q + Stroke Z + Stroke HR Plug 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A 12.5 19.5 16 Plug REBR15 REBR15 REA (mm) A

Plug-in Unit

2 (A) 4 (B) 2 1 4 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type (Slotted) 12 VDC 5 6 24 VDC Note) 3 position pressure center 2 position double (metal) (A) 4 (B) 2 (A) 4 (B) 2 5 Note) S kit is only available for 24 VDC. 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 2 Function 2 position double (rubber) 3 position perfect (A) 4 (B) 2 (A) 4 (B) 2 Nil R Y Standard type (1 W)

Compressed Air Cleaning Filter Series

Accessory Size Applicable body size 650 850 Symbol X17 P.69 Symbol Description Bracket 1 10 14 20 P.70 P.70 X26 X12 1 Nil B 1 1 2 2 1 Bracket is included, (but not assembled). Note) Refer to How to Order Bowl Assembly on page 63.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Table of Contents

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

ZP

K Hexagon width across flats 12 Hexagon width across flats 12 ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A A D E F N P E F N P B B Y Y C C D Misc.

Combination Cylinder

The series and their stopping accuracy are as follows: CLJ series (p.3.1-10), CLM2 series (p.3.1-18), CLG1 (p.3.127), CLA series (p.3.1-35), and CL1 series (p.3.1-50). wWhen kinetic energy acts upon the cylinder, such as when effecting an intermediate stop: There are constraints in terms of the allowable kinetic energy that can be applied to the cylinder in a locked state.

CL

D C B H d Tube I.D.

REA/REB

HP L 4-J Effective thread length E TC MQQ M X F WP WP RHC GW GP QW PW D 4-LD Piping port P Operating direction A MK(2) 7 W K G RS Q G HS CR Piping port P Operating direction B Piping port P (Plug) Operating direction B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction