I

T h e V YH y R e g R a n g e i s c o n s t r u c t e d b y u t i l i z i n g a standard control unit either alone (VY1D00-M5) or as a Pilot Valve controlling one of the Range of VEX1 Power Valves.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

1 1 1 G Normally Closed (N.C.)

Fluoropolymer Piping Equipment

) L2 M3 M3 F F C side A side C side A side 1/4 H3 (E3) G 1 G 25 H3 L3 (L1) (L1) (L3) Class 2 to 5 Class 2 to 5 Type T3 Type T4 Class 6 Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 M1 M2 M3 Min. port size Applicable tubing O.D.

KR

M5 x 0.8 Width across flats 8 Effective area: 4.0 mm2 Weight: 3.7 g Gasket: M-5G1, M-5GH Weight: 0.01 g Weight: 0.04 g 15-3-28

Aluminum High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 416 b XLA/XLA V Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Electrical entry G H L LN LO M MN MO Grommet (Lead wire: 300mm) Grommet (Lead wire: 600mm) With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector L plug connector M plug connector 2.2-9 Series SYJ300 Body Ported Grommet (G), (H): SYJ3l2-l G H ll-M3 With bracket: SYJ3l2-l G H ll-M3-F 28.4 2-3.5 22 3.2 Manual override (Mounting holes) 28 Depress

Series SV

D G D SI unit SI unit Master unit D 0V 24V G D 0V 24V G D 0V 24V G D 0V 24V L2 L1 G Power supply 24V 0V LINE1 LINE2 SHIELD L1 L2 0V 24V Transmission lines SHIELD SHIELD L1 L2 FG 24V 0V L1 L2 FG 24V 0V Black White Brown Blue Terminal resistor Main transmission line Transmission lines Crimped connector SL-J1A Power supply 24V 0V Class 3 ground Class 3 ground 0V 24V G D G D Power supply 24V

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

LX

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

CQ2

BQ-1 BQ-2 Weight (g) 1.5 1.5 Refer to p.5.3-75 for auto switch weight.

JIS Standard Hydraulic Cylinder

Hs 12 D-G5/K59 D-G5W/K59W D-G5BA D-G59F/G5NT D-B5/B64/B59W 24.5 A A 33 Auto switch G 1/2 (applicable cable O.D 6.8 to 9.6) Approx. Hs D-G39/K39 D-A3 34 56 56 A A 36 49 Auto switch G 1/2 (applicable cable O.D. 6.8 to 11.5) Approx.

SMC Pneumatic Clean Series

G H2 (Rc, NPT, G) Width across flats B2 Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

7ND9071en

Ex ia, II 1 D Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

Mechanical Valves Series NVM, NVFM, NVZNI

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

IIIIIII

P T , 0 079 in. (2mm) O T 0.059 in (1 Smm) T.T, 0 138 in. (3 5mm) -75 PSIG (5 Kgf/cm2) '75 PS|G (5 A B c D E F G 2.24 (571 1.26 (32) 0.94 (241 0.63 {16) 0.31 {8) 0.57 14.51 0.24 {6} A B c D E F G 2.48 (63) 1.50 {38) 0.94 (241 0.63 (16) 0 . 1 6 (4) 0.57 '14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses NVM120-N01-07 130-N01-08 Panel Mounting F O F 5 0 7 l b s ( 2 3 k s

Process Pump

1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82

Auto Switch Guide

Reed switch LED OUT () Terminal no. 2 OUT (+) Terminal no. 1 Resistor Zener diode Weight D-A34A, D-A44A (g) None 112 112 110 D-A33A D-A34A D-A44A Auto switch model Choke coil Reed switch LED Lead wire Terminal no. 1 OUT () Resistor OUT (+) Terminal no. 2 Zener diode Surge absorber Dimensions D-A3A D-A44 G 1/2 Tightening gland (Applicable cable O.D. 6.8 to 9.6) Tightening gland G 1/2 (Applicable

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Add 1 g for AC. ( ): Without sub-plate. 604 3 Port Pilot Solenoid Valve 10-SYJ300 Note) CE-compliant: For DC only.