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) 12 With filter (80 mesh) 23 15 , 8 1 4 1 48 (P, A, R port) 5-4-8

In the manifold specification sheet, specify the position where the block assembly is mounted. 13.1 3.4 Mounting hole Intermediate block assembly 2 (A) 2 (A) Clip 5 11.5 Gasket 4-11-14 Series S070 Exploded View of Separable Base Base mounted/SS073A-C Exploded View of Separable Base u i w r t q e !0 y !

1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Data ID Byte offset bit7 bit0 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 17 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +0 IN7 IN6 IN5 IN4 IN3 IN2 IN1 IN0 +1 IN15 IN14 IN13 IN12 IN11 IN10 IN9 IN8 +2 IN23 IN22 IN21 IN20 IN19 IN18 IN17 IN16 18 +3 IN31 IN30 IN29 IN28 IN27 IN26 IN25 IN24 +4 R R R R R R R R +5 R R R R DI_CHK

When using a single/double knuckle joint together with a rod end nut, the A and H dimensions should be extended.

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

IDX-OM-W029-B / Series IDU22E-23(-C,L,R,T,V) IDU22E-30(-C,L,M,R,T) IDU37E-23(-C,L,R,T,V) IDU37E-30(-C,L,M,R,T) IDU55E-23(-C,L,R,T,V) IDU55E-30(-C,L,M,R,T) IDU75E-23(-C,L,R,T,V) IDU75E-30(-C,L,M,R,T) URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General

Rod side, H: Head side Allowable kinetic energy Bore size Effective cushion length (mm) J (kgf/cm) (mm) 20 R: 7, H: 7.5 R: 0.35 (3.58), H: 0.42 (4.24) 25 R: 7, H: 7.5 R: 0.56 (5.67), H: 0.65 (6.66) 32 7.5 0.91 (9.3) 40 8.7 1.8 (18) When a large load is involved and a large kinetic energy is created as the piston moves at a high speed, the air cushion that is included in the basic cylinder

First, tighten the threaded portion by hand, then use a proper wrench, which could be suitable for the width across flats of the hexagon body, to tighten it further at a wrench tightening angle shown in the table below. For a tightening torque guide, refer to the table below. For R, NPT Thread (With sealant) Tightening method 1.

RIr-,rniTIi n"a I /'i\ v ' _ _ + _ (+) Elcrric Surue aboter D-FsBAUD-JsgW Il',A67 D-A64 D-A59W D-FsP, D.F7P, D-F7 PV D-F5PW D-F59, D-F79, O-F7NV t}F5NTL r+r B-6d Oulput @ I o Elack o L D-J51 r @ D-F59W D-F59F D-.J59, D"J79, Drr7gc, D-F7BV r l lf:r_ rlrtlH-r r-rad t l l l o{tsd OUT 1 output b Diagnoslic ouipul OUT D-472.O-472H D-480. D.A8OH fContu*-r box !

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Cable color Connector D terminal no.

Port variations Applicable cylinder MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 40 Series MY2 Auto Switch Precautions 1 Be sure to read before handling. Design and Selection Warning 1. Confirm the specifications.

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

BG-VZ202 BG-VZ203 VQ VKF VV3Z2-50-061-C6 BG-VZ205 VQZ How to Order Manifold Base VZ 1 08 30 VV3Z2 VS 2(A) port size on base side Series VZ200 Manifold VFN Model Symbol VV3Z2-50 VV3Z2-S50 Symbol Stations Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) Symbol M5 01 M5 x 0.8 Rc 1/8 Built-in One-touch

3 A A !0 !2 !7 !6 o !5 !1 i !4 Section A-A u Parts list Material Note No. Description No.

# # CB LH LB LY With head cover port in axial location (R) LT BB NB A NA X Y LX LZ S $ % & Z $ % & H LC CJ5 CG5 !