LEC-OM02904

I/O DB No.PD07PD09 DBOFF11kW (11.6) 7kW DO-1 SA No.PD07PD09 OFFOFF SAON 20r/min DO-1 VLC No.PD07PD09 VLCONOFFOFF DO-1 TLC No.PD07PD09 TLCONOFFOFF DO-1 ZSP No.PD07PD09 ZSPONNo.PC07 50r/min DO-1 OFF 70r/min OFF 70r/min 20r/min 20r/min () ON 50r/min ON 50r/min No.PC07 PC07 0r/min 0r/min No.PC07 PC07 ON 50r/min ON 50r/min 20r/min () 20r/min OFF 70r/min OFF 70r/min ON OFF ON

MXS Series Air Slide Table

Axial piping (16) MXS16P 25 62 Max. 6.5 Operating port 2-M5 X 0.8 (mm) J 62 62 62 72 87 137 185 235 Model MXS16-10R MXS16-20R MXS16-30R MXS16-40R MXS16-50R MXS16-75R MXS16-100R MXS16-125R 26 12 Dimensions not indicated are the same as basic type. 23.5 12 Dimensions not indicated are the same as basic type. 61 MXS Series Air Slide Table Dimensions MXS 20 2-M6 X 1 thread 6.5 deep Operating

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHK 5 15.7 4.7 3.5 MHS 2-3 12 41.5 (45) 8 2-4.2 17 MHC2 15.5 8 0 -0.05 2 MHT2 2 3.5 0 -0.03 3.5 0 -0.03 MHY2 Open: 22 Closed: 14 MHW2 2-M3 X 0.5 thread depth 6 (Thread for mounting attachment) MRHQ Auto switch 15 15 6 5 5 6 2.3-12 Series MHR2/MDHR2 20 Without Auto Switch: MHR2-20R 57 54 3-M4 X 0.7 thread depth 8 B MHR2-20E port position P.C.D36 (Mounting thread) 60 120 o 14 120o A C 45 M5

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/12855 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Basic: CXS15, CXSL15 10-/11221221Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !4 y e !1 !2 @3 @1 q !4y e !1 !2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !

SYJ300/500/700

Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

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1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

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1 ' l. , r t } | , a x Tspe 20R Xlanifold : Top Ported (External Pilot),l NYV3.L]-2OR{E!IEe!!") inch (mm.i Grommet (G) , (H) 0 1 8 ( 4 . 5 ) D ' a . H E 6 "o id' g : R ; i L Type Plug Connector(L) M Type Plug Connector(M) 0.47 t12t 0.33 {8.5) l f r!

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

depth 6 (A, B, C common view) MHW MRHQ 3-3 depth 6 +0.02 0 34 (A, B, C common view) Misc. 12h9 0 0.043 Auto switch mounting groove D1.5 1.5 5 2015.7 4.7 3.5 2-3 12 41.5 (45) 8 2-4.2 17 15.5 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-13 14 Series MHR2/MDHR2 Nominal Size 20 Without auto switch: MHR2-20R

MXS

MGQ MXS8-50F SMXS8, #3 MGG Axial piping (8) MXS8-llP MGC 15.5 Operating port MGF 40 Max 6.5 (mm) 2-M5 X 0.8 Model J 39 44 55 73 91 141 MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R CY1 MY1 15 6.5 * Dimensions not indicated are the same as the basic style.

MXS

Axial piping type (8) MXS8-P 15.5 Operating port 2-M5 x 0.8 40 Max 6.5 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 15 6.5 Other dimensions are the same as basic style. 13.5 12 Other dimensions are the same as basic style. 8-4-17 18 Series MXS Dimensions: MXS12 Basic style 2-M4 x 0.7 thread depth 5 Operating port 2-M5 x 0.8 9.5 2 4.75 J 8 Max. 11

Air Slide Table Series MXS

Axial piping type (8) MXS8-P 15.5 Max 6.5 Operating port 2 x M5 x 0.8 (mm) J 39 44 55 73 91 141 Model MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R 32.2 15 D6.5 Other dimensions are the same as the basic style.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

A, B, C common view) 3 x 3 depth 6 34 MHZ 12h9 0 0.043 Auto switch mounting groove MHF 1.5 1.5 MHL 5 15.7 4.7 3.5 2 x 3 MHR 12 41.5 (45) MHK 8 2 x 4.2 17 MHS 15.5 2 MHC 2 8 0 0.05 3.5 0 0.03 3.5 0 0.03 MHT Open: 22 Closed: 14 MHY 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) MHW -X 15 15 MRHQ MA D6 5 5 6 499 Series MHR2/MDHR2 Nominal Size 20 Without auto switch : MHR2-20R

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

SYJ300/500/700

Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

LEC-OM02704CN

/min O N () 5 0r/min No.PC17 0 r/min No.PC17 O N 5 0r/min 20r/min ( OFF 70r/min OFF ON (ZSP) 50r/minZSPON 70r/minZSPOFF50r/minZSP ON70r/minZSPOFF ZSPON 20r/min CDPS CDPSON . 4.5.2 (I/O)4.8.2 I/O A () LA CN6-11 CN6-24 PA15 CCWBA/2 ABPC19 DO-2 LAR B () LB CN6-12 CN6-25 LBR Z () LZ CN6-13 CN6-26 11 ON() 400s 100r/min DO-2 LZR 4 21 4 4.5.3 I/O I/F DICOM CN6-5 DC24V(DC24V10% 150mA

LEC-OM07605CN

PA10] ON DB RD ONRDON SA OFFSAOFFSAON ((X0.05)+20)r/min 20r/min VLC VLCONOFF ZSP ZSPON[Pr. PC07] 1) OFF 70 r/min 2) 3 20 r/min ON 50 r/min () [Pr. PC07] 0 r/min [Pr. PC07] ON -50 r/min 20 r/min OFF () -70 r/min 4 ZSP ON () OFF 50r/min(1)ZSPON 70r/min(2)ZSPOFF 50r/min(3)ZSPON-70r/min(4)ZSPOFF ZSPON 2Or/min 3 16 3.

IIIIIIIIII

after 24 hours RECOMMENDED FILTRATION 5 micron V-4104 SERIES (VACUUM) MAX SUPPLY 30" (760 mm) Hg EFFECT OF SUPPLY VARIATION < 0.01" (0.254 mm) Hg per 5" (127 mm) supply change when dead-ended REPEATABILITY < +/0.03" (0.76 mm) Hg DRIFT < .05" (1.27 mm) Hg after 24 hours ALL OTHER SPECIFICATIONS REMAIN THE SAME AS PRESSURE VERSION Part Number Description R-4104-1.5R-4104-3.5R-4104-10R-4104-20R

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Example Zero speed is 50r/min DO-1 1) OFF level 70r/min Forward rotation direction 20r/min (Hysteresis width) 3) 2) ON level 50r/min Parameter No.PC07 Servo motor speed 0r/min Parameter No.PC07 ON level 50r/min OFF level 70r/min Reverse rotation direction 20r/min (Hysteresis width) 4) zero speed (ZSP) OFF ON ZPS turns on 1) when the servo motor is decelerated to 50r/min, and ZPS turns off