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The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity. The VQ20/30's long life, high speed coil (up to 20 million cycles at 100cps for pneumatic use) along with its all plastic construction, make it an excellent choice for those who want high performance at a lower cost.Manifold for VQ20/30 pilot operated valve

[F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

When you operate the D type with a screw driver, turn it gently using a precision screwdriver. [Torque: under 0.05 Nm] When you lock the manual override of the D type, be sure to push it before turning. [Load: 10 N or less] Turning without pushing can cause damage to the manual override and trouble such as air leakage, etc.

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Option Note 4) D Note 7) N.O. (Normally open) Drain port is open when pressure is not applied.

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) Dimensions IC PVQ VEF VEP DXT334-X72-04R-04U VER Mounting section (For M8) L side VEA VY2 VBA VBAT U side D side AP100 1 2 2 x Rc Exhaust port R side Rc 1/2 supply port (L side) 2 x Rc 1/2, Output port 709

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc.

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.

Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

Option Manifold Plug-in unit 1 Option None Symbol Nil Stations 10 Clean series 2 B Note 2) D D0 D Note 5) K Note 3) N R Note 4) 200/220 VAC models (F/L kit only) With back pressure check valve DIN rail mounting With DIN rail bracket (Without DIN rail) With ejector unit Special wiring spec.

Normally closed (NC = b contact) solid state auto switches (D-Y7G/Y7H types) are also available. Refer to page 961 for details. Auto switches are shipped together (not assembled).

Low density polyethylene Operating Temperature Material Hardness Shore A 98A, Shore D 55D Note: Working pressure decreases as temperature increases.

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - M12 Connector), SI Unit Output Polarity: Positive Common (or None), Valve Stations: 4 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), P, E Port Size: N (ø5/16"), Mounting: D (DIN Rail Mounting, w/DIN Rail)

Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - M12 Connector), SI Unit Output Polarity: Positive Common (or None), Valve Stations: 6 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), P, E Port Size: N (ø5/16"), Mounting: D (DIN Rail Mounting, w/DIN Rail)

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

C.], [N.O./ N.O.] and [N.C./ N.O.] are available. o possible. up to 40 10.5 0.35 1.1 0.28 up to 63 16 0.18 2.4 0.48 up to 100 20.5 0.21 4.3 0.93 up to 125 24 0.18 7.0 1.6 Note) Values for 2-position single with tie-rod base manifold from the cylinder port to the exhaust.