VQ1000/2000 Series (PILOT VALVE : V100)

Clean the supplied air. 12 No.VQ1000V-OMM0002-B When the valve is failing, use this flow chart to clarify the cause of the failure and take countermeasures appropriate for the cause. Trouble Possible cause Countermeasures 1. Between valve and base 1-1) Looseness of clamp screw or mounting bolt. Give more torque to clamp screw.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Air cylinder

Description Qty 1 Rod cover 1 14 Wear ring 1 2 Head cover 1 15 Rod seal 1 3 Cylinder tube 1 16 Piston seal 1 4 Piston rod 1 17 Cushion seal A 1(2) 5 Piston 1 18 Cushion seal B 1(0) 6 Cushion ring A 1(2) 19 Cushion valve seal 2 7 Cushion ring B 1(0) 20 Cylinder tube gasket 2 8 Bushing 1 21 Bumper A 1(2) 9 Cushion valve 2 22 Bumper B 1(0) 10 Tie rod 4 23 Rod end nut 1 11 Tie rod nut 4 24 Magnet

Hydraulic Cylinders

across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J Y X Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 12 M6 x 1 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 12 M6 x 1 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 16 M8 x 1.25 40 69 55 14 22.4 19 16 M12 x 1.75 15 8 10 20 M10 x 1.5 50 75 60 15 28 24 21 M16 x 2 20 9.5

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

,

class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation at low temperatures.

,

1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA,

E-P HYREG

VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

class B 1W DC (42mA) 1W DC (83mA) (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) Power consumption (Current) 24VDC 12VDC 3-position closed center (A) 4 (B) 2 Note 1) Use dry air to prevent condensation at low temperatures.

Compact Cylinder with Solenoid Valve/

Manual override Nil B Non-locking push type Locking slotted type Number of auto switches Nil S N 2 pcs. 1 pc. n pcs.

VXA21/22

Base, Body Seal Aluminum NBR, FPM, EPR Model Manifold base Port A Rc(PT) Port P Rc(PT) Port R Rc(PT) VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations ManifoldO Manifold style Manifold stations B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 4.1-73 VVXA31/32 Common (C.O.)

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

CEx-OMQ0011

:Robot IEC 60204-1:Safety of machinery Electrical equipment of machines-Part1:General requirements JIS B 8370: JIS B 9960-1:-((1:) JIS B 8433-1:2007--1 *2) 1. 2. 3. a. b. c. 4. a. b.

VF1000-OMP0001

) ) ) ) PE 1) 1) 1) 1) 2) 2) 2) 2) PE PE (AMC ) 3 3 3 3 (A,B) (N.C.)N.O.3 3 B (CYL.1) A (CYL. 2) N.C.

VFR3000-OMJ0001

: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VFR3000-OMJ0001-A / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / () ( ) () 1 DC 3 3 () 3 EXH (VVFS3000-R-03-12 ( ( ( ( ) ) ) ) 0.1

MX-OMP0051

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 3 *3) 1 1.5 3) 1 1 () 4 1 1-1 MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 1) 2) ( ) 3) 4) / / 2 ,3 ) 2 2 ,3 ) 1) 1 2) 20 ,0.150.6MPa 3) MXQ25(A)-150,MXQ6B-50,75MXQ8B-75,100MXQ16B-100,150MXQ20B-125,150 300mm/s 4) MXQ**B 50200mm/S 1 (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3 MXQ16(A) 0.2

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

Digital Flow Switches, Series PF2A, Series PF2W

8 + Load 2 Switch output 12 to 24VDC White 4 3 7 Black 4 (43.5) A 3 1 5 Blue PF2A5--1 (mm) A B Output specification Sensor unit Display unit (PF2A30/31) Pulse output only 42 62 Brown 52 72 Pulse output + Analog output 1 6 2 Analog output Main circuit Main circuit 8 4 2 Load + 12 to 24VDC Switch output White Black 4 7 3 43 2-3.4 Flow direction 3 5 1 Blue PF2A5--2 PF2A511, 521, 551 B Wiring