Large Type Vacuum Unit Series ZR SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure
PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.
Note Bracket B and the bracket assembly make up one set.
Note Bracket B and the bracket assembly make up one set.
CXSL6-PS 6 10 15 20 25 32 CXSL 6 PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS @2 @3 @4 Set of left nos. @2, @3, @4 Piston seal CXSL10B-PS Rod seal NBR CXSL15A-PS O-ring CXSL20A-PS CXSL25A-PS CXSL32A-PS Seal kit includes @2, @3 and @4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.
CXSL6-PS 6 10 15 20 25 32 CXSL 6 PS CXSL 10 B PS CXSL 15 A PS CXSL 20 A PS CXSL 25 A PS CXSL 32 A PS @2 @3 @4 Set of left nos. @2, @3, @4 Piston seal CXSL10B-PS Rod seal NBR CXSL15A-PS O-ring CXSL20A-PS CXSL25A-PS CXSL32A-PS Seal kit includes @2, @3 and @4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.
Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.
CVS1N40-PS CVS1N50-PS CVS1N63-PS CVS1N80-PS CVS1N100-PS Rod seal 1 pc Contents of the seal kit Piston seal 1 pc Pipe gasket 2 pcs Valve port gasket 2 pcs Cylinder tube gasket 2 pcs Note) Seal kits include grease pack.(40,50:10g, 63,80:20g, 100:30g) Grease pack part number: GR-S-010(10g) , GR-S-020 (20g) Table 10.
4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 94.9 76.2 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Dimensions Formula: L1 = 17.5n + 52, L2 = 17.5n + 106 n: Stations (Maximum 16 stations) 16 332 386 412.5 423 15 314.5 368.5 400 410.5 14 297 351 375 385.5 13 279.5 333.5 362.5 373 12 262 316 337.5 348 11 244.5 298.5 325 335.5
(L4) (L3) (5.25) L2 L1 Top entry port Not machined 27 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
B B B B B B B X P X P 49 24.5 9.5 STA 1B 1A 1 2B 2A 2 4B 4A 4 3B 3A 3 D SIDE U SIDE 16 TERMINANAL NO.
(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 One-touch fitting R R 61.5 G 1/2 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A
RS-422/232CDSV-CABV(Diatrend) 14 3 14 14.2 14.2.1 () () [bps] 9600/19200/38400/57600/115200 bit bit bit bit 1bit 8bit 1bit() 1bit (LSB) (MSB) 0 1 2 3 4 5 6 7 1 (11bit) 14.2.2 RS-422 (1) () PC21 0 9600[ b ps] 3 57600 [bps] 1 19200[ b ps] 4 115200[ b ps] 2 384 00[ b ps] (2) RS-422 ()0 800s1800s PC21 RS-422 0 1 800s (3) PC20031 14 4 14 14.3 14.3.1 32 * 0 (1) 10 (
8 as a set MU32T-PS MU32S-PS Bumper Urethane MU40T-PS MU40S-PS Bumper B Urethane MU50T-PS MU50S-PS MU63T-PS MU63S-PS Seal kit includes !5, !6, !7, !8 (excluding !5 for spring return type). Order them with a part number for each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 87
8 as a set MU32T-PS MU32S-PS Bumper Urethane MU40T-PS MU40S-PS Bumper B Urethane MU50T-PS MU50S-PS MU63T-PS MU63S-PS Seal kit includes !5, !6, !7, !8 (excluding !5 for spring return type). Order them with a part number for each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 87
Contents Bore size (mm) RZQ32-PS RZQ40-PS RZQ50-PS RZQ63-PS 32 40 50 63 RZQ32-PS RZQ40-PS RZQ50-PS RZQ63-PS !9 @0 @1 @2 23 @4 Piston seal Set of left nos. !9, @0, @1, @2, @4 Rod seal A 23 is a non-replaceable part, so it is not included in the seal kit. Rod seal B NBR Gasket A Seal kits are sets consisting of items !
Contents Bore size (mm) REBH15-PS REBH25-PS REBH15-PS REBH25-PS 15 25 Set of left nos. @9, #0, #1, #2, #3, #4, #5 @9 #0 #1 #2 #3 #4 #5 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal #5 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.
Contents Bore size (mm) REBH15-PS REBH25-PS REBH15-PS REBH25-PS 15 25 Set of left nos. @9, #0, #1, #2, #3, #4, #5 @9 #0 #1 #2 #3 #4 #5 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal #5 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.