Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

2-Color Display Digital Flow Switch Series PFM

Piping Specifications / Mass P . 921 Analog Output P . 921 Internal Circuits and Wiring Examples P . 921 Dimensions P . 922 Series PFM7 , PFM5 Common Specifications Pressure Loss / Flow Characteristics P . 930 Parts Description P . 931 Construction P . 931 PFM Detection Principle P . 931 PFMV Component Parts P . 932 PF2A Series PFM3 Flow Sensor Monitor PF2W How to Order P . 933 Specifications

33

Power consumption P: 1000 [W] Q = P = 1000 [W] Cooling capacity = Considering a safety factor of 20%, 1000 [W] x 1.2 = 1200 [W] V: Power supply voltage HRSH 090 P HRSH Power consumption HRSE HRSE e Derive the heat generation amount from the output. Output (shaft power etc.) W: 800 [W] w Derive the heat generation amount from the power supply output.

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

TABLE OF CONTENTS

3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

CATALOG VC10

(41.7) 1.00 .30 1/8-27 N.P .T .

Nozzle Type Ionizer

to order p. 20 Bar nozzle (straight type) Circumferential jet bar nozzle (straight type) Bender tube nozzle Long nozzle 6 C O N T E N T S Nozzle Type Ionizer IZN10E Series Technical Data Static Neutralization Characteristics p. 8 Blow Velocity Distribution p. 8 Flow Rate Characteristics p. 9 Ozone Concentration p. 9 Energy saving static neutralization nozzle How to Order p. 10 Specifications

155

Z B1 A L S X1 q w e r t y u i o !

Digital Flow Switches

Pin description 1 DC(+) 2 NC/Analog output 3 DC() 4 OUT 31 Digital Flow Switch Series PF2A/PF2W For Air/Water Description Remote Type/Display Unit PF2A300, 301, 310, 311 PF2W300, 301, 330, 331 Integrated Display Type PF2A710, 750, 711, 721, 751 PF2W704(T), 720(T), 740(T), 11 q q w t r SMC FLOW SWITCH w U P e SET e UNIT y RESET OUT2 OUT1 SET u DOWN t y u r RESET button ( + button) If the

3 Port Solenoid Valve Metal Seal Series VZ200 1

No. t y Stainless steel Aluminum die-casted Material Note No. q Description Gasket Return spring Platinum silver Spool/Sleeve Body w e r O-ring u NBR Seal i NBR O-ring o NBR O-ring NBR O-ring !0 NBR Piston Polyacetal Platinum silver Aluminum die-casted Sub-plate 01 02 NBR Mini Y seal !1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached.

Manifold Specifications

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

KR

(mm) Note) Weight (g) D L1 L2 L3 A M P Q1 Q2 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 x 0.8 12 10 11 10.4 18.5 24 26.5 30.5 29.5 32 36 25.5 27.5 16 10.4 18.5 10 30 26.5 33 29.5 4.3 4.1 4 1 8 1 4 6.0 4.1 14 21 13 M5 x 0.8 4.3 4.3 13 12.8 21 17 12.8 20.5 12 1 8 15 22 35 29.5

Mini Free Mount Cylinder

T NTJ-015A NT-015A NT-02 M5 x 0.8 4 8 9.2 12 U T' M6 x 1 5 10 11.5 16 M8 x 1.25 5 13 15 20 (mm) A Bore size (mm) B C D GB J K L MM NN N P Q QA 12 16 20 3.5 17 26.5 6 4 15.5 11 8 M5 x 0.8 M3 x 0.5 effective depth of thread 6 3.5 M3 x 0.5 4.4 through 7.5 depth, depth of counterbore 5.5 3.5 21 29.5 8 4 17 12.5 11.5 M6 x 1 M4 x 0.7 effective depth of thread 8 5.5 M3 x 0.5 4.4 through 7.5 depth

Clean Gas Filter

Construction q t e r w IN Description No.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

T NPTF Coil rated Electrical entry 3 8 G F 1 100 VAC, 50/60 Hz Grommet Nil T Conduit terminal Standard 4 1 2 Option 2 200 VAC, 50/60 Hz Port size Manual override P None Nil Option WTB Dripproof conduit terminal 3 110 VAC, 50/60 Hz 1 4 Rc 3 8 Rc 1 2 Rc 3 4 Rc 02 03 04 06 TZ Conduit terminal w/ surge voltage suppressor 4 220 VAC, 50/60 Hz How to Calculate the Flow Rate 5 24 VDC 9 Other TL

Lightweight and Compact

Applicable model Minimum operating flow rate (50/60 Hz) [L/min] HRS-BP005 HRS090-ll-20/40 29/45 To circulating fluid return port r t r e q To circulating fluid outlet r t w r Parts List No.

LX

N x P (52) 28 20 U N (M6 x 1) C (5.1) 1 0.2 5 T-slot A 36: T-slot pitch 39 36 28 Body mounting reference plane 4H9 +0.030 0 6.5 27.5 Work piece mounting reference plane Refer to Cross section C-C.