Adapter Material: Brass, Pad Diameter: ø10, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: B (Bellows), Pad Material: N (NBR), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø10, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: B (Bellows), Pad Material: U (Urethane Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø4, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Pad Diameter: ø4, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø8, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø8, Pad Type: UM (Flat w/Groove), Pad Material: U (Urethane Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø16, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Pad Diameter: ø4, Pad Type: B (Bellows), Pad Material: U (Urethane Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Pad Diameter: ø13, Pad Type: B (Bellows), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Pad Diameter: ø16, Pad Type: UM (Flat w/Groove), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: S (Stainless Steel, Stainless Steel 304), Pad Diameter: ø6, Pad Type: UM (Flat w/Groove), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Table of Contents

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions