AC Servo Motor Driver (Pulse input type) Servo amplifier Driver Controller (Note 6) CN1 (Note 6) (Note 2) 21 DICOM 24VDC (Note 4) CN1 Trouble (Note 5) 20 46 DICOM 48 ALM RA1 Zero speed detection DOCOM 23 ZSP (Note 3) Emergency stop Servo-on Reset Speed selection 1 Speed selection 2 EMG SON RES 42 15 19 (Note RA2 Limiting speed 25 VLC RA3 Ready (Note 10) 49 RD SP1 SP2 41 16 RA4 10m max.
SYJA3520-M3 2 position single SYJA3140-M5 48(22) Base mounted 2 position double SYJA3240-M5 51(25) 1.8 (0.1) 3 position exhaust center SYJA3340-M5 M3 X 0.5 M5 X 0.8 54 (28) 3 position exhaust center SYJA3440-M5 3 position pressure center SYJA3540-M5 2 position single SYJA3130 22 4 port base mounted (For manifold) 2 position double SYJA3230 25 M3 X 0.5 (1) 1.2 (1) M3 X 0.5 3 position exhaust
Set "acceleration time 0 to 3" to use for the acceleration time during positioning. 0: Use the value set in "Pr.9 Acceleration time 0" 1: Use the value set in "Pr.25 Acceleration time 1" 2: Use the value set in "Pr.26 Acceleration time 2" 3: Use the value set in "Pr.27 Acceleration time 3" Da.4 Deceleration time No.
Possible to drive cylinders: Up to 25 (300 mm/s) Base Mounted For details, refer to page 741. Power consumption: 0.35 W Flow rate characteristics C [dm3/(sbar)]: 0.39 Added 3-position closed center.
N.C. 24 No.ZL3-OM00801-A 11. ,, 11.1 25 No.ZL3-OM00801-A 11.2 11.3 (V),0, Pmax () (P1 Q1 ) (Qmax) 0() , 1L ZL3H ,-90kPa ,4.0 ,Pmax Qmax , 26 No.ZL3-OM00801-A 12. 12.1 12.2 0 27 No.ZL3-OM00801-A 13.
Th cov6r cannot b rotabd on iha bodv, OBINGMANIFOLD MOUNTING PATTEBN PIPETAPIS I/E'NPTFOT 1/4" NPTF AS SPECINED BYMODEL NUMgER DIMENSIONS A B c D E F G H J K M N P R s 5.4 (128) 2.40 (61) 1.77 (4s) 0.94 (211 0.24 (6) o.a1 (8) 228 (58) 0.8:l (211 2.13 (54) o.a7 (221 1.06 en 0.98 (25) 0.39 (10) 0.79 (20) 0.98 (25) Millimeters In Parentheses PARTS LIST O.ldl n t Noi.qt rYa 316 1 Eody Al3rnbly-ri
AR 25 AR 35 Note) P 1 1 2 1 0.02 to 0.2 MPa Note) Pressure display unit: MPa, psi 4 1 G46-P2-02-X30 25 35 0.05 to 0.83 MPa Note) 2 Pressure gauges are shipped with regulator, (but not assembled).
VE How to Order Flow Characteristics VY1 12 AF 00 8 127 R Pressure drop (MPa) G P1 = 0.3 MPa P1 = 0.3 MPa Option P1 = 0.5 MPa P1 = 0.7 MPa P1 1 = 0.5 MP = 0.5 MPa P1 = 0.7 MP = 0.7 MPa P1 = 0.1 MPa P1 1 = 0.1 MPa Air filter PPA Drain cock thread piping {Rc 1/4} Drain guide D Body size 4 J R 8 9 1 2 1 2 AL Flow direction: From Right Left Auto-drain specifications Option Flow rate (/min (ANR
A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.
When the motor mounting position is right side parallel (LEFS*R) or left side parallel (LEFS*L), the rotation direction PA14 selection is 0(+: Counter motors side). -25- LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter *1,*2 Para. Initial value Recommended value No.
Control mode Selection) . 24 5.3.4 Recommended Parameter Values by Actuator Model. 25 5.3.5 Absolute position detection system . 35 5.3.6 Remote register-based position/speed specifying system selection . 36 5.3.7 Electronic Gears . 37 5.3.8 Verify of parameters . 38 5.3.9 Parameter initialization . 39 5.4 JOG Mode in the Setup Software . 40 5.4.1JOG Mode. 41 5.5 Changing I/O Signal Allocation
Timing Chart Blue Suction command OFF T54 ON OFF Suction output 25 mA Max. Brown ON 80 mA Max. 24 VDC VS VL OFF White Release output Black ON Timer period Blue 20 to 2,000 ms Note) When power is supplied, release output is performed once for the time period only.
Set value input mode Press the "SET" button to display "P1-20" 1. The output OUT1(1) set value input mode is selected. 1: The set value of P1 is -20 ZSE3/ISE3(L) kPa RESET SET LED Bottom hold mode Pressing the button when pressure is displayed enables the lower limit peak value (value with low vacuum) to be held. In this case "d" is displayed on the LCD.
P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow
Standard: single acting, single rod, spring return/extend, Bore sizes *: 20, 25, 32, 40, Strokes *: 25~200, Mounts: basic, foot, front or rear flange, front or rear trunnion, clevis, Auto switch capable with a variety of lead wire lengths, KIT, SEAL, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, P1, 63MM CG PART, .02200 lb
Standard: single acting, single rod, spring return/extend, Bore sizes *: 20, 25, 32, 40, Strokes *: 25~200, Mounts: basic, foot, front or rear flange, front or rear trunnion, clevis, Auto switch capable with a variety of lead wire lengths, SEAL KIT, ACTUATOR, CG1Y SMOOTH CYLINDER, P1, 63MM CG1Y PART, .00000 lb
Standard: single acting, single rod, spring return/extend, Bore sizes *: 20, 25, 32, 40, Strokes *: 25~200, Mounts: basic, foot, front or rear flange, front or rear trunnion, clevis, Auto switch capable with a variety of lead wire lengths CG/CG3 ROUND BODY CYLINDER. KIT, SEAL. ACTUATOR. 63MM CG PART. .02200 lb. P1.
Standard: single acting, single rod, spring return/extend, Bore sizes *: 20, 25, 32, 40, Strokes *: 25~200, Mounts: basic, foot, front or rear flange, front or rear trunnion, clevis, Auto switch capable with a variety of lead wire lengths, SEAL KIT, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, P1, 63MM CG PART, .13838 lb
Standard: single acting, single rod, spring return/extend, Bore sizes *: 20, 25, 32, 40, Strokes *: 25~200, Mounts: basic, foot, front or rear flange, front or rear trunnion, clevis, Auto switch capable with a variety of lead wire lengths, SEAL KIT, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, P1, 63MM CG PART, .02794 lb