5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

fitting Applicable series Type of actuation SY3000 2 position single (A) 4 (B) 2 1 SY5000 5 (EA) 3 (EB) 1 (P) 2 position double (A) 4 (B) 2 2 SY7000 5 (EA) 3 (EB) 1 (P) 3 position closed center (A) 4 (B) 2 3 Manual override 5 (EA) 3 (EB) 1 (P) 3 position exhaust center Nil: Non-locking push type E: Knob locking type D: Slotted locking type (A) 4 (B) 2 4 5 (EA) 3 (EB) 1 (P) 3 position pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

Warning CE2 1. Do not rotate the cover. When installing a cylinder or screwing a pipe fitting into the port, the coupling portion of the cover could break if the cover rotated. Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1.

CJ2X/CUX/CQSX/CQ2X/CM2X

Warning CE2 1. Do not rotate the cover. When installing a cylinder or screwing a pipe fitting into the port, the coupling portion of the cover could break if the cover rotated. Auto switch model Bore size (mm) 20 32 40 25 ML2B BM2-032 BM2-040 BM2-020 BM2-025 D-C7/C8, D-H7 D-B5/B6, D-G5 D-A3A/A44A, D-G39A/K39A Caution BA2-032 BA2-040 BA2-020 BA2-025 C J G5-S BM3-032 BM3-040 1.

PSxx-OMH0002CN

()FSC SET 5R.D. 1 digit UP 1 UP 1 DOWN 1 DOWN 1 UP DOWN 1 SET 4 LoCUnL UP DOWN SET LoC SET 4 UnL -23No.PS-OMH0002CN-D 0 7F.S.0 (01 digit) UP DOWN 1 -24No.PS-OMH0002CN-D (2030) -25No.PS-OMH0002CN-D ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) ISE70/ISE75(H) () 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 -26No.PS-OMH0002CN-D 6 Yes No 7 7 8 9 10 11 12 13 14 15 -27No.PS-OMH0002CN-D

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K AA BB H J M N P1 P2 A B Note 1) C D 10-/21-AR20K-B 2 Note 2) 1/8, 1/4 20.5 30 1/8 11 34 40 43.9 44 67.4 5.4 65.5 26.5 15.4 28.5 55 M28 x 1 2.3 28.5 24.7 28.5 14 6 10-/21-AR25K-B

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 AS421-04 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Uses flame resistant resin as standard. (UL standard V-0) R 3 8 R KE 1 2 R Note 1) : Brass parts are electroless nickel plated, provided as standard.

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Modular Type Air Filter Series AF

Body size C With bowl guard AF20 Port size M5 1/8 1/4 3/8 1/2 3/4 1 AF10 to 60 Symbol 10 20 30 40 50 60 Note 5) Drain guide 1/4 AF30 to 60 N Note 1) Float type Note 4) auto drain (N.O.) M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Stroke for Auto Switch Mounting (mm) ML1C Bore size (mm) No. of auto switches mounted Applicable auto switch Auto switch model 25 6 4 32 6 4 40 6 4 D-M5/M5W/M5TL D-E7A/E80A D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Stroke for Auto Switch Mounting (mm) ML1C Bore size (mm) No. of auto switches mounted Applicable auto switch Auto switch model 40 6 4 D-M5/M5W/M5TL D-E7A/E80A 25 6 4 32 6 4 D-M5, D-M5W, D-M5TL D-E7A, D-E80A D10 15 5 10 1 pc. 2 pcs.