SMC Corporation of America
Elite Part Number Search
Search Results "XLA-25-M9PA"

Series XLA-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA-2 valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  

Flange Size: 25, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Spring Extend C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Cylinder model Mounting bolt part no.

to 800 18 15 18 46 12 14 23 25 35 7 1/4 60 45 33.2 7.5 56 5.5 153.5 30 12 43 103 128 M8 1 M16 1.5 40 25 to 800 22 19 22 51 12 19 32 25 37 9 3/8 62 63 41.7 10 73 6.5 185 34 18 47 128 153 M12 1.25 M20 1.5 50 25 to 800 28 25 28 57 9 24 33 25 42 11 1/2 67 75 52.3 12 74 7 199 42 18 53 134 159 M12 1.25 M27 2 63 36 32 25 to 800 36 55 13 30 33 32 39 13 1/2 71 90 64.3 12 80 12 216 50 17

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

to 40, 63 to 100 50 16, 20 25 to 63 16, 20 6, 10, 12, 16 8 to 40 6, 10 12 to 20 25 32 to 100 25 to 63 10 to 20 25 to 40 50, 63 16, 20 25 to 63 16, 25, 40 16 to 63 6 to 20 25 to 63 6 to 40 10 to 32 10, 15, 25 15, 32 6 to 20 6 to 16 6 to 25 6 to 25 8 to 20 8 to 25 4, 6, 8 6 to 16 32 to 63 32 to 63 25 to 32 10 to 20 Bore size D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

MHSL3-16D MHSL3-16D 25 25 Pressure 0.6 MPa 20 20 Pressure 0.6 MPa Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 15 15 0.4 MPa 0.4 MPa 10 10 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 5 5 F 0 0 5 5 10 10 20 20 25 25 30 30 15 15 Gripping point L (mm) Gripping point L (mm) F F MHSL3-20D MHSL3-20D 40 Pressure 0.6 MPa 35 MHZ Pressure 0.6 MPa External grip 35 30 0.5 MPa 0.5 MPa MHF 30 25 25 20 20

, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

25 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) D-A59W n (Same surface) 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 2 (Different surfaces, same surface) 15 25 25 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) n (Same surface) 10 25 25 1 2 (Different surfaces, same surface)

n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 D-F5l D-J5l D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 1 10 25 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n =

Bore size Standard stroke Long stroke (L and F only) CS1 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 Symbol Specifications CS2 -XA Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 -XB5 Oversized rod 50, 63 1200 Heat resistant (150C) -XB6 -XC3 Special port positions 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

-30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 7.2 11

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

This is a legacy product. Please contact us for the latest version.sales@ocaire.com