70pvpump Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.
Setting Mode 26 Function Selection Mode 28 Function selection mode 28 Default setting 28 F 0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42 F11 Display resolution setting 48 F80 Power saving mode 49 F81 Security
Setting Mode 27 Function Selection Mode 29 Function selection mode 29 Default setting 29 F 0 Units selection function 31 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 5 FUNC terminal setting 40 F 6 Fine adjustment of display value 42 F10 Sub display setting 43 F11 Display resolution setting 49 F80 Power saving mode 50 F81 Security
Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 41 F80 Power saving mode 42 F81 Security code 43 F82 Input of line name 45 F90 Setting of all
75 224 6 7 7 11 11 15 15 17 16.5 16.0 16.0 18.0 18.0 40 40 40 14 18 18 22 26 31 31 36 59 66 66 80 81 133 133 141 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 27 30 31 37 40 35 35 39 84 90 98 116 126 98 98 106 8 0 0 0 0 51 58 58 71 72 110 110 120 238 246 255 263 297 306 316 325 363.5 386.5 378 401 413 434 9-3-9 42 Series CL1 Rod Side Flange Style (F) 40
A AL B1 C CD CX CZ D E F H H1 I J K KA L MM NA Standard Long stroke GA GB P GA GB P 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 32 50 18 28 56 25 40 3 71 13 89 M10 x 1.5 10 22 35 M22 x 1.5 86 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 41 60 22 32 64 30 50 3 71 16 110 M12 x 1.75 10 26 43 M26 x 1.5 106 (mm) (mm) With Air Cushion With Rod Boot (mm
C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.
Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.
Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.
F F H H Note) Male thread effective length should be no more than 100 mm.
Alarm1 Water Leak Detect FLT 01 Alarm2*1 02 Alarm3 RFGT High Press FLT 03 Alarm4*1 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.
How to Order CL Number of auto switches L 100 200 F JN CL1 CL1 Without auto switch 2 pcs. 3 pcs. 1 pc. n pcs.
When assembling the manifold, refer to page 37. -13No. ZK2-OM01301 2.
K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.
ZQ-OM01301-A 9.2 Weight 9.3 Supply/release pilot valve specifications Single part number Model, additional specifications Weight [g] ZQUA-K15L-F-00-N (Basic type for single unit) 70 ZQMA-K15L-F-0 (Basic type for manifold) 70 Without release valve -10 Supply valve N.O. specification +2 With vacuum pressure switch (Lead wire is not included) +20 Bracket assembly type +25 Lead wire with connector
Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01
unit (F) E P F Model ZX100 K6 Circuit diagram (Circuits other than those with vacuum switch are shown as below.)
W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5
0 Differential pressure check mode, pressure range, display unit 31 F 1 Setting of OUT1 37 F 2 Setting of OUT2 40 F 3 Digital filter setting 42 F 4 Auto-preset function 43 F 5 Auto-shift setting 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off setting 55 F80 Power saving mode 56 F81 Security code 57 F90 Setting of all
Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.