VFS

Quick wiring permits easier installation. 01C VV5FS5 2 04 D 05 VS4 Stations Thread type Series VFS5000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations VQ7 Symbol 04 06 A, B P, R1, R2 U side Plug-in type with multi-connector T 08 1 2 Rc Rc Rc M Mixed 8 stations EVS F 3 4 3 4 Max. 8 stations Option Connector mounting direction VFN For bottom ported, Rc is only available.

Proposals for Energy Saving

M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

NCG/CG1

Applicable bore (mm) 20 25 32, 40 50, 63 d H B C NCG Knuckle Pin JM-025 JM-03 JM-045 JM-05 0.16 0.19 0.26 0.32 (0.50) (0.58) (0.79) (0.87) 1/4-28UNF 5/16-24UNF 7/16-20UNF 1/2-2UNF 0.44 0.50 0.69 0.75 inch Part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D 01C VV5FS3 2 05 02 Thread type Series VFS3000 Manifold Port size Nil N Rc NPT NPTF G Symbol 02 03 A, B P, EA, EB Connector mounting direction U side Plug-in type with multi-connector T 1 4 Rc Rc Rc Mixed F 3 8 1 2 D side mounting U side mounting D U M Option D side Symbol Stations Plug assembly (Option) Refer to page 1227.

LEC-OM071xx

Maximum output speed = Common parameter 05 3. Maximum acceleration/deceleration = 20971520 [Reference unit/s2] 8-90 8 MECHATROLINK-III Commands 8.15 Subcommands The following table shows the subcommands. For information on the combinations of main commands and subcommands, refer to 8.5.4 Combinations of Main Commands and Subcommands.

7.5

Note SJ3160-5CUCO 2 sets SJ3000-76-1A SJ2000 SJ3000 With power supply terminal (for PC wiring) SJ3000-120-1A-C8 1 set SJ3000-76-2A-05 Note) When ordering with an intermediate connector block assembly installed in the manifold, please order using the manifold specification sheet.

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 40 Applicable solenoid valve 10-SYJ514M-(-Q) 10-SYJ524M-(-Q) How to Order 10 SS3YJ5 40 05 M5 Clean series Applicable blanking plate assembly Refer to page 621.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 5/32" 9.3 7 9.6 28.8 30.1 25.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" 16 1/8" 27.5 20.4 9.3 12.7 5/32" 17 13.4

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

MB

(mm) Auto switch model Bore size 50 63 80 100 125 32 40 D-A3/A44 D-G39/K39 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 BMB2-032 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-050 BMB4-050

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

HEC-OM-S008

03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D 0D 01 32 02 36

Mini Rotary Actuator

Mass* CRJB05-90 32 CRJB05-100 05 CRJB05-180 39 CRJB05-190 Basic type CRJB 1-90 54 CRJB 1-100 1 CRJB 1-180 67 CRJB 1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU1-90 70 1 CRJU1-180 81 *Mass of auto switch is not included. Effective torque Table 4.

CLQ

A type mounting bracket B type mounting bracket Joint YA YB YU 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 Applicable mounting brackets Bore size (mm) Joint A type B type B type mounting brackets 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 100 YU-10 YA-10 YB-10 Allowable eccentricity (mm) RS 32 40 50 63 80 100 Bore

F

Applicable Applicable Model D L A M Minimum Tube OD Fitting Size d Hole Applicable Applicable Model D L A M Effective Tube OD Fitting Size d Orifice (mm 2) Inch Diameter mm Nylon/Urethane 1/8 9(5/32) KQR01-03 10 37 21 15.5 2.5 3.2 4 KQR23-04 9.2 34 17.5 15.5 3.4/2.9 1/8 4.8(3/16) KQR01-05 10 37.5 21 15.5 2.5 4 6 KQR04-06 10.4 34.5 17.5 16 5.6/5.6 5/32 4.8(3/16) KQR03-05 11 38 21.5 16 3 4

Vacuum Module Series ZX

How to Order W 1 05 ZX1 PV, V port size Nozzle diameter Nil 05 07 10 0.5 mm 0.7 mm 1.0 mm M5 x 0.8 M6 x 1 (Option) Y Ejector exhaust method 1 2 Silencer Individual exhaust Rc 1 8 Dimensions: ZX1-W 1 2 48.2 JIS Symbol Port exhaust 47 EXH port (EXH.)

Compact Cylinder with Lock Series CLQ

CNS YA YB YU Type A mounting bracket YA-03 YA-05 YA-08 YA-10 6 18 56 55 Type B mounting bracket Joint 8 22 67 100 CLS 10 28 83 195 12 36 100 340 CLQ Applicable mounting bracket Bore size (mm) Joint Type A mounting bracket Type B mounting bracket RLQ Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 MLGP 100 YU-10 YA-10 YB-10 RS ML1C Allowable

ZX

(ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no. Z L 5 ZX1 VJ114 Ejector unit nozzle dia. 05 07 0.5 mm 0.7 mm 10 1.0 mm 1 2 With silencer Port exhaust 3 Common exhaust Z L 4 2 5 ZX1 VJ3 Ejector type (Exhaust type) Manual override Type of actuation Nil B Non-locking push type Locking slotted type 1 2 N.C. (Normally closed) N.O.