Electric Actuators

110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 108 114 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300 400 500 600 700

Compact Rotary Actuator Series CRQ2

CRQ2X MSQX CRQ2XB20CRQ2XB30CRQ2XB40101 101 MSQXB30A MSQXB50A MSQXB20A 102 102 Moment of inertia (kgm2) Moment of inertia (kgm2) MSQXB10A 103 CRQ2XB10CRQ2XB15103 104 104 D105 5.0 0.7 106 5.0 0.7 105 2.0 1.0 0.5 0.3 0.2 1.0 0.5 0.3 0.2 2.0 Rotation time (s/90) Rotation time (s/90) If the rotation time exceeds 2 s per 90, kinetic energy is calculated with rotation time of 2 s per 90. 315 Model

Intrinsically Safe Valve

Solenoid Valve (Body Ported) (Base Mounted) UL Certified Intrinsically Safe Valve Designed for Use in Intrinsically Safe Environment UL913 & CSA157 Compliant Series 53-SY5000/7000/9000 NC300-C Dimensions Compact, High Flow Compact, High Flow B A L3 Model Dimension L1 L2 L3 53-SY5120-L 53-SY5120-LL 53-SY5120-TT 53-SY7120-L 53-SY7120-LL 53-SY7120-TT 53-SY9120-L 53-SY9120-LL 53-SY9120-TT 104

CHKD/CHKG

Bore size (mm) LA B BB C F L CD D E G H K LH LT LX 20 25 32 40 50 63 80 100 76 6.6 9.5 depth 5.4 43 12 70 10 18 10 M8 x 1.25 6 5.5 23 15 58 78 6.6 9.5 depth 5.4 45 76 14 12 18 M10 x 1.5 12 6 5.5 26 15 64 11 depth 6.5 86 9 51 18 94 14 19 15 M12 x 1.75 7 6.6 33 16 79 14 depth 8.6 98 55 11 22.4 108 23 19 20 M16 x 2 7 9 37 20 90 111 14 17.5 depth 10.8 60 28 126 24 27 24 M20 x 2.5 8 11 43 24 104

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A B NN x M5 x 0.8 thread depth 10 5 HA GA 4H9 ( ) depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Refer to pages 103, 104 and 113 for details.

High Vacuum Angle Valve

) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104

Table of Contents

How to Order . 74 75 77 77 78 81 82 82 83 83 83 83 83 84 84 84 85 85 85 85 85 86 86 86 86 86 87 88 89 89 90 90 91 92 92 93 93 94 95 96 97 99 99 99 99 101 102 104 104 104 105 107 108 110 110 110 110 112 113 115 115 115 116 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

CXWM/CXWL

Local Area: (800) 258-9200-www.stevenengineering.com 4-M6 x 1.0 thread depth 9 2 x 2-M5 x 0.8 (Hexagon socket head cap plug) CX D2-M5 x 0.8 Cylinder port -X 20Data 2-M4 x 0.7 thread depth 5 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 4-5.5 through 4-9.5 counterbore depth 5.5 2-RB1006-X552 (Shock absorber) (mm) ZZ 184 234 284 334 384 434 484 Z 156 206 256 306 356 406 456 S SS 104

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, E/P REGULATOR, VALVE, VY1 E/P REGULATOR, JA, VY1 BODY PORT 1/2, 1.50747 lb

PFxx-OMA1007

Locking is released by pressing the SET button. (3) For the input method, refer to [F81] Security code (checking of the setting of security code) (page 104). (4) If the security code entered is correct, the indication of the main display changes to [UnLoC], and pressing one of the UP, SET or DOWN buttons releases the key lock and the measurement mode returns.

LEC-T1_C

.** .101 (9) TB .102 (9-1) TB . 102 (9-2) TB . 103 (9-3) TB . 103 (10) .104 3 - (10-1) . 104 6.4 .105 1.105 11. 105 2.106 21. 106 3.107 31. 107 7. /.109 8. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO

JXCx-OMX0009

Handling Precautions . 102 19.4 Operating environment . 103 19.5 Maintenance Precautions . 104 19.6 Precautions for actuator with lock . 104 20. Controller and Peripheral Devices/Specific Product Precautions . 105 20.1 Design and Selection . 105 20.2 Handling Precautions . 105 20.3 Mounting . 106 20.4 Wiring . 107 20.5 Power supply . 107 20.6 Grounding . 107 20.7 Maintenance . 108 20.8.

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

SI unit for DeviceNet TM

Class Instance Attribute Description Value 0: Switch No.9 setting valid (SMC) 01h 68h (104) Hold Clear 64h (Default) (Connection Delete) 1: Fault action valid or Class Instance Attribute Description Value 0: Switch No.9 setting valid (Parameter) 05h 01h Hold Clear 0Fh (Connection Delete) 1: Fault action valid 2) Set the fault action and fault values via the network.

smcmaintenancepartslist

Mechanically Jointed Rodless Cylinder/Linear Guide/Single Axis Type Air Cylinder MY2HT CS2W P.47 P.104 Mechanically Jointed Rodless Cylinder/Linear Guide/Double Axis Type Air Cylinder/Double Rod MY3A CS2Y P.48 P.105 Mechanically Jointed Rodless Cylinders/Basic Type Smooth Cylinder MY3B CUJ P.49 P.107 Mechanically Jointed Rodless Cylinders/Basic Type Mini Free Mount Cylinder MY3M CU P.51

MHZ

Model MHK MHS Gripping force (1) Bore size (mm) JIS Symbol Double acting Opening/ Closing stroke (Both sides) (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model MHC External Internal MHT 28 60 130 250 460 28 60 130 255 465 28 60 130 255 460 6 10 16 20 25 6 10 16 20 25 6 10 16 20 25 6.1 17 40 66 104 3.3 9.8 30 42 65 1.9 6.3 24 28 45 4 4 6 10 14 4 4 6 10 14 4 4 6

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

112 63 57.5 62 57.5 104 121 112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.