Hygienic Design Cylinder Series HY

Mass (g) B FD FE FT FX FY FZ Fd Mounting bolt ZA ZB 82 87.5 102.5 103 ZC 104 111.5 134.5 135 ZB 97 102.5 117.5 118 ZC 119 126.5 149.5 150 HY-F032SUS HY-F040SUS HY-F050SUS HY-F063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L 260 320 580 770 49.5 57.5 69 82 7 9 9 9 6 8.5 11 11 10 10 12 12 64 72 90 100 32 36 45 50 80 90 110 120 29 34 39 44 152 169 187 202 Note 1)

AS

Operating Pressure Flow Direction Symbols on Body Average particle concentration Particles/ft3 1.2 104 Max. operating pressure MPa Meter-out type Meter-in type Grade 4 1.0 103 Symbol 0.8 Grade 3 102 0.6 101 Grade 2 JIS Symbol 100 0.4 Grade 1 10-1 0.2 0 -5 0 20 40 60 1 0.1 0.2 0.3 0.5 Operating temperature C Particle size m or less Note) Refer to back page 10 for details. 489 Series AS-FPQ

Compressed Air Cleaning Filter Series

. 48 Series AME Dimensions AME150C to 350C P Q T S R F E D N Bracket L U (Accessory) O K G M V W J B OUT IN C I A Maintenance space (mm) A Model Port size Bracket related dimensions B C D E F G I 98.5 N 56 J 20 K 5 U 6 V 6 L 12 M 6 W 10 O 35 P 70 Q 26 R 54 S 4.5 T 1.6 AME150C AME250C AME350C 10 54 63 7.5 63 10 1/8, 1/4 83 14 73 76 5 76 10 121 66 24 8 6 6 12 6 10 40 80 28 66 5 2 1/4, 3/8 103

2/3 Port Valve for Various

) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69 25.5 40 150 153 (168) 59 35.5 70 81 VXR2390-20 2 VXR2392-20 ( ): N.O. 17-3-60

Vacuum Ejector Series ZM

For Single Unit/Without Valve Basic Type with Switch ZM2 H M S Supply Exhaust 111 1/8 (Rc, NPTF, G) Air pressure supply port (P) 3 x 4.5 Mounting hole Vacuum Supply P 30 26 70 62 10 36 V Vacuum Silencer 15.5 Dimensions of model with high noise reduction silencer assembly is the same as standard. 30 20 1/8 (Rc, NPTF, G) Vacuum port (V) Vacuum 103 V 13 80 8 1/8 (Rc, NPTF, G)

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

1 103 4 7 10 20 40 70 100 200 Flexing radius [mm] 10.5 Inrush currents at power-on of main circuit and control circuit The following table indicates the inrush currents (reference data) that will flow when the maximum permissible voltage (200V class: 253VAC, 400V class: 528VAC) is applied at the power supply capacity of 2500kVA and the wiring length of 1m (3.28ft).

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

b 1 103 4 7 10 20 40 70 100 200 Bend radius [mm] 10.5 Inrush currents at power-on of main circuit and control circuit The following table indicates the inrush currents (reference data) that will flow when 240 V AC is applied at the power supply capacity of 2500 kVA and the wiring length of 1 m.

EXxx-OMZ0016

(Wch: 120-127) Remote diagnostic information (Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127)

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560--01 Rc(PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15)

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103

Refrigerated Air Dryer

AFF Select accessories sold separately. 6 Refer to page 103.

Air Cylinder

301 to 1500 40 37 32 50 25 40 3 20 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 3/8 122 100 Up to 300 301 to 1500 40 37 41 60 30 50 3 20 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 1/2 122 Bore size TA TC** Without rod boot With rod boot on one side* With rod boot* Female Rod End (mm) on both sides (Reference) JW H ZZ e f h IJ JH Bore size A1 H MM ZZ (Reference) l ZZ ZZ 20 8 13 M4 x 0.7 103

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

10-, 21-) Vacuum port (11-, 22-) Effective thread length FL NA Width across flats B2 G H2 NN Width across flats KA G Width across flats B1 H1 MM NA 20, 25 Eh8 D Standard port 45 Relief port (10-, 21-) Vacuum port (11-, 22-) 1.5 A AL K ZZ + Stroke S + Stroke H F 32, 40 (mm) ZZ H H2 H1 S P I G E D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K AL F 8 13 0 1/8 138 109 107 103

VK300

= Number of VK300 Grommet: G DIN terminal: D Manual override (Non-locking) Applicable cable O.D: 3.5 to 7 78.4 68.8 Max.10 70.9 300 (Lead wire length) 2 x Rc 1/8 (P port) 2 x Rc 1/8 (P port) Pg7 n1 x Rc 1/8 (A port) 2 x 4.5 (Mounting hole) 2A 2A 2A 35 19 (Pitch) 44.5 11 (Station 1) (Station n) (Pitch) n x Rc 1/8 (R port) L Dimension n L n: Stations 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination