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VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

Material 16 25 40 50 Standard AS568-122V AS568-129V AS568-140V AS568-231V External seal e AS568-122 AS568-129 AS568-140 AS568-231 XLAQ XLDQ Special Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 Special S valve seal assembly r XLD40-2-9-1A XLD50-2-9-1A Standard XLD50-2-9-1A XLDQ XLD40-2-9-1A Special Note 1) Add a suffix for the

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Blanking plate assembly (Manifold option) Part no: V100-77-1A Place notch mark on the blanking plate to 2 port side when assembling.

R Port M5 0.8 R Port M5 0.8 S 20 20 stations A, B Port M3 0.5 P Port P Port M5 0.8 A, B Port M3 0.5 Applicable solenoid valve: SYJ3 30SYJ3 33M5 0.8 Type 32(4 Port / Base mounted type) Applicable blank plate ass'y: SYJ3000-21-2A SS5YJ3-32-05 --M5T Type 32 Type S32 ( ) Single solenoid coil is located on same side as the A, B port.

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D

PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S

Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

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4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?i,oxl+4r5"a, I l r c o M " I r + r t r c o M c , + l ll coM" i q (+) ( coMo ro(+) /r'Y;-"' M* fr'fi-"" ' ire!.f s | ) ,-Js!jr L , 3 smms { l'.;+_2. ( ) ( L--!9!!" zz r +r 3sd5{fj:3'?L i 3 idb61f-1:-_r: ( ' tl co 22 l+) tL-Lg!!"r5 L+' tL-l-s!"

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount

5 VDC R 3 VDC * There is no S option for AC, since a rectifier prevents surge voltage generation.

code: 0x05 (fixed) (S+2) 0x0005 BIN16 bit Device number *1 Start address of the device being read 165535 BIN16 bit (S+3) Read data size.