Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Yes (1) No (1) Yes Yes (W/o indicator light) (1) (1) Coil voltage DIN terminal with surge voltage suppressor Without connector (1) YOS Yes (W/o indicator light) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note 1) DIN is applicable to VQZ200 and 300.

PSxx-OMS0006CN

(ZS-46-A1) 3X8L A B(ZS-46-A2) 3X8L B -14No.PS-OMS0006CN-G (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -15No.PS-OMS0006CN-G (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 1~1.5Nm -16No.PS-OMS0006CN-G -17No.PS-OMS0006CN-G ,FG -18No.PS-OMS0006CN-G Z/ISE20(F)-N NPN 1 Max.28 V80 mA 1 V -P PNP 1 Max.80 mA 1 V -19No.PS-OMS0006CN-G [] 3 0.2 [] / OUT1 OUT1 [F10]30 (

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Applicable valve stations 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) 2 stations: 83 Addiitional station: 19 Rc(PT) 1/8 Top VQZ100 2 to 20 VQZ115 VV3QZ12-lll SY 2 stations: 68 Addiitional station: 20 C4 (for 4) C6 (for 6) M5 (M5 thread) Rc(PT) 1/8 Top VQZ200 2 to 20 SYJ VV3QZ22-lll VQZ2l2 VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 2 stations: 114 Addiitional station

AR20-B to AR60-B

Note 6) Pressure can be set higher than the specification pressure in some cases, but Standard Specifications Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size Note 1) 1/8 Fluid Air Ambient and fluid temperature Note 2) 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-01 2 1 8 3 VFA3430-01-X1 5 Body ported Base mounted VFA3122-02-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8 2 Speed Controller with One-touch Fitting Elbow Type (Metal Body) Series AS Flow Rate and Effective Area AS321-03 AS421-04 AS221-01 AS221-02 AS121-M5 Model Tubing O.D. 12 10 10 8 6 8 4, 6 6, 8 Controlled

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Process Pump

Fluoropolymer Needle Valve Series LVN Specifications LVN20 LVN30 LVN40 Model Orifice diameter 4.4 4, 6 1/8", 3/16", 1/4" Metric Inch 10 10, 12 3/8", 1/2" 8 6, 8, 10 1/4", 3/8" Tube size Refer to Best Pneumatics No. 7 for further details.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41

3 Port Air Operated Valve

-41 Common EXH 1(P) port 1/2 3(R) port 1/2 2(A) port 1/2 2 to 20 stations VPA700 VV3PA7-42 Individual EXH 1(P) port 1/2 2(A) port 1/2 3(R) port 1/2 Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more. 1557 3 Port/Air Operated Valve Body Ported/Single Unit How to Order VPA300/500/700 Series VPA 3 4 2 1 01 A Series 3 5 7 VPA300 series VPA300

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

-fl Seies

: Sta. l) NVFR2l 10-3G Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?