MGG

9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

High Power Cylinder Series RHC

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3

5 Port Solenoid Valve, Series VQC

N.C. 2-position double (metal) 4-position dual 3-port valve (B) Coil voltage 4 2 A B B 24VDC 12VDC 5 6 Note) 1 5 3 P EA EB N.O. N.O. 2 2-position double (rubber) 4-position dual 3-port valve (C) 4 2 A B C C: Locking type (Manual) Function Note) 1 5 3 P EA EB N.C.

rep-filter-e

2Element guide 9-2 9-3 468 Series FGA Replacement Procedure of Element 2 2. Overhaul 3. Removal of the Cover 2-1. If the differential pressure rises due to clogging and reaches the threshold for element replacement (0.1 MPa), replace the element with the new one. 2-2. The removal and mounting of the element at the time of overhauling shall be made in the following sequence. 3-1.

Industrial Filters Replacement Procedure

2Element guide 9-2 9-3 468 Series FGA Replacement Procedure of Element 2 2. Overhaul 3. Removal of the Cover 2-1. If the differential pressure rises due to clogging and reaches the threshold for element replacement (0.1 MPa), replace the element with the new one. 2-2. The removal and mounting of the element at the time of overhauling shall be made in the following sequence. 3-1.

MNB

3 !4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

MNB

The above screw kit is also included when D-F5BA type switches are shipped separately. 9-6-25 26 Series MNBW Construction $3 #8 @9 #2 $9 @3 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r @8 $0 w #9 $2 A C B $1 #4 !4 !3 #3 @6 #8 y $4 #5 #6 $6 !0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !2 32 100 80 63 50 40 80, 100 80, 100 Description Material Note Component Parts No.

LEY-OM007

c. d. e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

3 Port Solenoid Valve

9 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted manifold / Bar base SS073B01Stations C 2-M5 0.8 1 (SUP) port 2-M5 0.8 3 (EXH) port L2 L1 3 10.5 7 P = 7.2 4.3 8 21.5 4.3 4.0 11.9 3 1 3 1 18.9 24 22 5 150 (lead wire AWG#26) 22 2-3.4 Mounting hole 6.4 n U side 1 2 3 4 5 D side (21.5) (10.5) 21.5 2 2 3.9 P = 7.2 11 n-M3 0.5 2 (OUT) port Dimensions Formulas

IDX-OM-W011

i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4

Lightweight and Compact

Low flow switch flow signal Remote operation switch Input 2 Input 1 To the users equipment PC HRS Circulating fluid temperature setting Start and stop Output 1 Output 2 Output 3 Circulating fluid discharge temperature Flow switch HRS Output setting example Output 1: Temperature rise Output 2: Pressure rise Output 3: Operation status (start, stop, etc.)

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

Digital Gap Checker

Description 1 DC (+) 18 6.5 2 N.C. 24 Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 3 DC () 36 4 OUT1 Unit: mm 1: Conforming to ISO1179-1 Stations 1 2 3 4 5 6 (49) 47 L1 38 76 114 152 190 228 18 2 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 ISA3-mm (DIN rail mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38

CLA

3 wire systemfPNP (mm) 40 50 63 80 100 Grommet 2 wire system Foot c;.1 {()4 CAHw CAHOO CA Il '~ CAH10 I Flange CAI fN (;.

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

MY1

IC circuit Z76 5V Yes Z73 100V 12V Grommet Relay PLC 24V 2-wire 100V or less 5V 12V IC circuit Z80 No 3-wire (NPN) 3-wire (PNP) Y69A Y59A IC circuit 5V 12V Y7PV Y7P Y69B Y59B 2-wire 12V 3-wire (NPN) 3-wire (PNP) Y7NWV Y7NW Diagnostic IC circuit Grommet 24V Yes 5V 12V Relay PLC indication Y7PWV Y7PW 2-color display Y7BWV Y7BW 2-wire Waterresistant 12V Note 2) 2-wire Y7BAL 2-color

SZ3000

13.3 24 24 16.2 16.2 17 36.7 SV 34 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 SZ P 1 P 1 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 SY 2n2One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 6 SYJ Applicable connector: 26 pins MIL type With strain relief (Conforming to MIL-C-83503) (L4) L3 SX 6.6

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

VQ5101 (A) 4 (B) 2 VQ5100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts