Wedge Cam Operation Provides

switch mounting 4-M5 X 0.8 (Thread for mounting attachment) M5 X 0.8 (Finger closing port) Adjustment needle for finger speed Groove position for auto switch mounting (2 positions) MHZ2 S O 3 20 MHZJ2 4 16 12 0 -0.05 6 12 Note) For single acting, one port is used as bleed port. 8 MHQ 23 M5 X 0.8 (Finger opening port) MHL2 2.3 MHKL2-25l/Long stroke model MHR MHK 22 MHS 4H9 depth 4 +0.030

Low Friction Cylinders Series MQ

79 10 10 ( 9.8) 40 12 55 52 10 7 6 8 10 28 5.4 9 25 10 to 50, 75, 100 96.5 M6 x 1.0 M6 x 1.0 84.5 12 12 (11.8) 45 13.5 Rc 1/8 NPT 1/8 G 1/8 49.5 58 60 10 7 7 4.5 10 12 34 5.5 9 30 10 to 50, 75, 100 116 M8 x 1.25 M6 x 1.0 104 13 16 (15.8) 52 17.5 Rc 1/8 NPT 1/8 G 1/8 57 71 69 10 7 10 5 14 12 40 5.5 9 40 10 to 50, 75, 100 116 M8 x 1.25 M8 x 1.25 104 13 16 (15.8) 64 17.5 Rc 1/4 NPT 1/4

Stainless Steel 316 Fittings

10.7 17.2 13.5 14.1 16.5 16.6 17.5 15.9 21.6 18.2 18 22.5 22.8 18.9 17.6 25.9 19.8 18.5 28.1 23 12 3.8 3.7 7.6 7.4 8.7 14 12.3 12.8 22.8 17.7 19.1 20.9 37.2 24.8 19.3 33.6 41.6 38.4 M5 x 0.8 M5 x 0.8 1/8 4 12.6 D Applicable tube M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 12 6 13.6 20.6 M A 14 L 24.7 22.9 23.1 25.6 27.5 Connection thread 14 8 16.1 23.3 17 (R) H 17.2 17

KJ

(inch) Connection thread R Model H (Width across flats) L2 A M Min. port size <M5> Note) Weight (g) D1 D2 L1 15.3 10 KQ2L01-M5 M5 x 0.8 7 1 8 10 2.5 8.4 12.7 24 13.2 14.3 2.3 KQ2L05-02S KQ2L05-01S 1 8 22.5 26.5 11.4 10 19.5 16.5 3.5 3 16 1 4 3.2 19 18 26 14 12 16.1 KQ2L07-M5 M5 x 0.8 7 13.6 15.1 2.3 1 8 1 4 KQ2L07-01S 23.5 26 10 4.6 10 20 32 12 20 28 23 Applicable tubing 1 4 KQ2L07-02S

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 Bore size (mm) 16 20 90 110 PP SS 2.5 5.0 PA 40 50 PB PG 3.5 4.5 Q 153 191 QQ QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 Bore size

Electric Actuator

Compared with SMC LJ1 series (Work load: 10 kg) 80 40 40 90 Equipped with seal bands as standard 40 40 Covers the guide, ball screw and belt. Prevents grease from splashing and external foreign matter from entering.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9 4.5 M12 x 1.75 10.5 18 10.5 18 M14 x 1.5 19 8.5 19.5

Modular F.R.L. Unit

AC40B AC40B-06 AC50B AC55B AC60B 71 11 25 56 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 7 4.5 20 27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 40 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 50 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 50 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 75 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Rotary Actuator

0 0.030 30 80 92 72 70 20 35 3 50 M12 x 1.75 depth 13 5 199 (243) 1.5 5 29.5 33 186 (230) 142 22.5 23.5 13 9 43.5 19 25 12 6 0 0.030 40 100 112 85 85 25 40 4 60 M12 x 1.75 depth 14 5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 14 10 43.5 29 25 12 8 0 0.036 45 Note) A parallel key is included in the same package, (but not assembled).

VFS

11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

CLQ

68.5 19.5 22.5 51 58.5 10 12 7 12 29.5 32.5 36 40 27 31 M5 x 0.8 M6 x 1.0 47 52 8 10 4.5 5 25.5 28 36 42 39.2 43.2 21.2 23.2 9.5 10 6.5 7 19 21.5 5 to 50 5 to 50 20 25 For retraction locking For rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) VH1 W1 X H1 H2 L1 C1 20.5 23 12 14.5 14 17.5 12 15 M8 x 1.25 M10 x 1.25 5 6 18.5 22.5 20 25 20 25 7 Compact Cylinder with Lock Series

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Compact Cylinder with Air Cushion and Lock Series RLQ

Cylinder model C D Mounting bolt size RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 M5 x 90 L Mounting bolt CLJ2 95 M5 x 95 L 100 M5 x 100 L CLM2 110 M5 x 110 L 8 C Flat washer D 120 M5 x 120

Auto Switch Guide

x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive position Most sensitive position 9

MY1

-X417 Fine stroke adjustment range (mm) -X417 (one side) Adjustment range MY1MW MY1CW -X416 (one side) Adjustment range Slider (Piston yoke) Stroke adjusting unit Bore size (mm) Spacer lengths Spacer length MY1MW MY1CW 5.6 to 11.2 6 to 12 11.5 to 23 12 to 24 16 to 32 20 to 40 25 to 50 11.2 12 23 24 32 40 50 5.6 6 11.5 12 16 20 25 11.2 to 16.8 12 to 18 23 to 34.5 24 to 36 32 to 48 40 to 60

MTS

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 or less (Within allowable torque values) 0.2 or less (within allowable torque values) Non-rotating accuracy Piping port size M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.