EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

HRX-OM-Y098

-A-20 .

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

. 90 Drive unit 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 11-5-2 11-5-3 3 Series MSU Precautions Be sure to read before handling.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

HRX-OM-X037

Fig. 9-11 Cooling Capacity (HRL100-A-40-T2 CH1) 9.4.6 HRL200-A-40-T2 CH2 30 Ambienttemperature 25 Cooling capacity [kW] 32oC 20 15 45oC 10 5 0 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [oC] This is the cooling capacity of the CH1 side when 1 Kw heat load is applied to the CH2 side.

C95

45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Mounting holes for manifold) [ ] for AC VZ L plug connector (L): SYJ5l2-lLll-M5 M plug connector (M): SYJ5l2-lMll-M5 VS 15.5 15.5 11 2.5 2.5 A A 11 13 8.5 13 8.5 34.7 34.7 65.5 51.9 300 (Lead wire length) 55.9 [57.2] (Lead wire length) 300 40.6 [47.1] 29.5 [36] 26.6 14.5 23 17.1 26.6 14.5 3 20 20 10.5 23 10.5 10 2-2.6 9 8 9 8 2-2.6 3 10 15 (Mounting holes) (Mounting holes) 15 50.7 50.7

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

Floating Joint

-150 JA63-16-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50

3 Port Air Operated Valve Series SYJA300

VZ VS VFN 4-4-11 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3 20 05 Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air to

Modular F.R.L. Unit

4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.

Modular/F.R.L. Units Series AC

25 89 70 20 27 4.5 4.5 7 2.8 24.5 30 132 118 114 24 33 5.5 12 5.5 3.2 29 151 176 41 184 150 156 35 7 14 4 41 7 154 179 41 187 153 159 35 7 14 4 41 7 191 216 50 222 190 196 40 9 18 4 48 9 193 218 50 224 192 198 40 9 18 4.6 48 9 271 297 70 303 270 277 50 11 20 6.4 60 11 285 310 70 316 284 290 50 11 20 6.4 60 11 288 313 70 319 287 293 50 11 20 6.4 60 11 Note) For the AC20B only, the

High Power Cylinder Series RHC

KA S + Stroke NF LX LZ CX LS + Stroke ZZ + Stroke MQ RHC (mm) RZQ A AL B C D EA FA GA H KA LD K JC H1 E Bore size (mm) 50 0 11 75 7 18 11 500.062 62 23 16 80 70 53 20 35 32 63 0 550.074 11 75 7 11 18 16 80 20 58 23 35 32 80 60 80 0 650.074 13 78 10 22 13 23 20 90 37 95 75 25 61 40 D100 0 16 80 10 800.074 26 13 95 90 30 63 25 20 40 37 116 LH LS LT LY LX LZ M MM NE NF S P X Y WH ZZ Bore size

OMU0023

for start of Step Data No. 20 operation) Instruction to execute the operation of Step Data No. 10 01 10 9100 0001 02 0100 01 10 9100 0001 20 sent. 11 01 02 004B 0001 01 02 01 Acquires the INP signal information.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

CXS

up to 1000mm/s; up to 50mm 10 Graph V = up to 1000mm/s; up to 75mm 11 2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V = up to 1000mm/s; up to 100mm 12 CXSM CXSL Weight m (kg) Made to Order Auto Switches 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang L (mm) 63 Series CXS Safety

7.5

Symbol Stations 02 20 20 2 stations 20 stations Specify the valve stations not exceeding the maximum stations. SUP/EXH block fitting spec.