VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

B1 AWG 20 B2 Note.

LEC-OM07605CN

(b) OFF ON OFF 63.4% CDT = 100 ms 100 50 100 4.00 10.00 4.00 120 84 120 3000 4000 3000 20 50 20 1 50 60 50 1 50 60 50 1 0.20 0.15 0.20 1 0.20 0.15 0.20 2 20 30 20 2 20 30 20 2 0.10 0.05 0.10 2 0.10 0.05 0.10 (2) (a) PB06 GD2 4.00 [] PB08 PG2 120 [rad/s] PB09 VG2 3000 [rad/s] PB10 VIC 20 [ms] PB29 GD2B 10.00 [] PB30 PG2B 84 [rad/s] PB31 VG2B

0.

2 stations 20 stations Note 1) Order DIN rail separately.

Fieldbus system EtherCAT compatible SI Unit

(AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

Table of Contents - Tubing

04 B 20 Tube O.D.

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Power Valve: Economy Valve Series VEX5

-20 VEX5504 06 10 VEX57-10 12 14 20 VEX592444 Power Valve: Economy Valve Series VEX5 How to Order How to order pilot valves VEX5 1 06 2 E Z 5 1 B SF4 20 Option Economy valve Light/Surge voltage suppressor None B Nil Bracket G Pressure gauge Electrical entry Rated voltage Light/Surge voltage suppressor (Only with solenoid) Type (Ex.)

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

KB

Different Diameter Module: KBR Component module T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size VMG KBR2-1 KBR3-2 KBR4-3 KBV2-06 KBL2-R2S 4 Plug/Cap: KBP, KBC (P . 15-3-117) Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x

Vacuum System Peripherals:

Series ZM 13-14-20 4.

JXCx-OMX0009

Specifications . 20 3.1 Specifications . 20 (1) Basic specifications of the product. . 20 (2) CC-Link communication . 21 3.2 Parts Description . 22 3.3 External Dimensions. 23 (1) Screw mounting (JXCM17#-#) . 23 (2) DIN rail mounting (JXCM18#-#) . 23 3.4 Mounting . 24 (1) Mounting . 24 1 - (2) Grounding . 24 3 Mounting location . 25 (4) Precautions for electric actuator compatible with battery-less

CYP

-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

JXCx-OMT0062

Product Specifications . 17 3.1 Specifications . 17 (1) Basic specifications . 17 (2)CC-Link type . 18 3.2 Parts description . 19 3.3 Outside dimension diagram . 20 (1) Screw mount type LECPMJ-. 20 (2) DIN rail mount type (LECPMJD. 20 3.4 How to install . 21 (1) How to install . 21 (2) Ground wire connection . 21 (3) Installation location . 22 4.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5