Clean Air Module

in 24 variations Available in 24 variations Digital flow switch Regulator Regulator + Pressure outlet port ON/OFF valve Restrictor Filter Regulator + Filter Digital flow switch + Regulator + ON/OFF valve + Filter Regulator + ON/OFF valve + Restrictor + Filter LLB4 Flow range: 50 to 500 L/min (ANR) LLB3 Flow range: 5 to 100 L/min (ANR) Related Equipment Pressure gauge for clean room G46-4-01

Series KV2 Fittings

30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41 68 57 111

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

VV5FS2 MANIFOLD, WITH BLOCKING PLATES, 4/5 PORT SOLENOID VALVE, I50, 800 lb

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

FREE MOUNT CYLINDER

(mm) Operating direction 0. 3 0. 5 0. 7 1. 6 OUT 3 6 IN 21. 2 2. 86 7. 10 11. 3 3. 0 OUT 4 10 IN 66. 0 12. 9 26. 1 39. 3 5.9 OUT 6 16 IN 172 37.2 71. 8 106 5. 9 OUT 20 8 IN 264 58 111 164 11 OUT 25 10 IN 412 95 178 260 16 OUT 32 12 IN 691 173 312 420 Note) Prevent load from being applied to the piston rod when the piston rod is being extended. 6/10 2.

CLQ

208 192 50 118 53 32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot type (includes mounting bolt) Front flange type (includes mounting bolt) Rear flange type (includes mounting bolt) Double clevis type (includes pin, snap ring, bolt, and flat washer) 76 111

Compact Cylinder with Lock Series CLQ

17 7 149 208 192 118 53 32 9 221 351 326 158 53 32 18 288 523 498 64 26 17 3 137 174 159 45 12 8 3 174 149 140 Magnet Thread Nut Rod end male thread With rubber bumper Foot style (Including mounting bolt) Rod side flange style (Including mounting bolt) Head side flange style (Including mounting bolt) Double clevis style (Including pin, snap ring, bolt and flat washer) 518 1064 1839 373 111

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

.: NTP-010 Material: Carbon steel (Nickel plated) Width across flats 12 9.5 With end lock 4.5 96 + Stroke 111 + Stroke 242 Series MTS Precision Cylinder Dimensions: 16 MTS16 Note) Spline rods width across flats have nothing to do with the position of the body mounting face.

Compact Cylinder with Air Cushion Series RQ

Add the stroke to calculate the length of intermediate strokes. 782 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot Style mm Foot style: RQL/RDQL L B + Stroke Bore size (mm) Stroke range (mm) A B LS L L1 LD LG LH LT 63 81.2 55 29 18 43.5 11 5 46 3.2 30 to 100 LH LY Special cap bolt 80 95 63.5 33.5 20 53.5 13 7 59 4.5 40 to 100 100 111 76 42 22 53.5 13 7 71 6 40

Compact Cylinder with Lock Series CLQ

208 192 50 118 53 32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot type (includes mounting bolt) Front flange type (includes mounting bolt) Rear flange type (includes mounting bolt) Double clevis type (includes pin, snap ring, bolt, and flat washer) 76 111

Precision Cylinder Series MTS

2 x 4-7.5, counter bore depth 4.5 (opposite side also) 22 0.2 4-M5 x 0.8 Effective length 8 6.5H7 +0.015 0 13h7 0 0.018 30 0.2 30 0.2 40 38 31 32 57.5 109 + Stroke 21 130 + Stroke 22 0.2 4-M5 x 0.8, effective length 8 28 0.2 22 Rod end male threads 0 0.018 13h7 Width across flats 11 M8 x 1.25 M8 x 1.25 12.8 15 13 5 12 14.5 6 41.5 Stud bolt part number: MT-S25 Rod end nut part number: NT-02

Precautions 1

NT-02 NT-03 NT-04 Part no.

Series AP3500

Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet) (Outlet) AP30 00 2PW FV4 FV4 S Model Option Code Cv 0.23 0.28 Code Specification Indicator switch 3) 00 02

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Refer to pages 11-1-34 to 35 for details on how to set the rotation time. 20Allowable load on the shaft Refer to the model selecting order step 3 for rotary actuators on page 111-20 concerning allowable loads on the shafts of Series CRA1. 11-7-7 8 Series CRA1 Construction Without air cushion Size: 30 Without air cushion Size: 50 to 100 Component Parts Description Material Note Note No.

High Pressure Coolant Valve

SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111

CQ2

Nickel plated For only CDQ2A 2.3-111 Series CQ2 32 to 50 Series CQ2A The dimensions are the same with or without an auto switch. Both ends tapped Rod end male thread Above switch: D-A73/A80 Refer to p.2.3-116 for auto switch mounting position and mounting height.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Refer to pages 11-1-34 to 35 for details on how to set the rotation time. 20Allowable load on the shaft Refer to the model selecting order step 3 for rotary actuators on page 111-20 concerning allowable loads on the shafts of Series CRA1. 11-7-7 8 Series CRA1 Construction Without air cushion Size: 30 Without air cushion Size: 50 to 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 9 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type/RQL, RDQL Foot type mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD LG LH LT Special cap bolt 63 81.2 55 29 18 43.5 11 5 46 3.2 30 to 100 LH LY 80 95 63.5 33.5 20 53.5 13 7 59 4.5 40 to 100 100 111 76 42 22 53.5 13 7 71 6 40 to