Multi-channel Digital Sensor Monitor [Initial Setting] (Function selection mode [F 0]) (Refer to page 21) Set the differential pressure check mode, pressure range, and display unit of the connected sensor. -19No.PS-OMW0005-C [Measurement mode] Detects the pressure after power is supplied, and indicates the display and switch operating status.
Display LCD LCD with backlight LED Pressure setting range 101 to 10 kPa 101 to 0 kPa Maximum operating pressure 200 KPa Operation indicator light (Lights up when ON) Green OUT1: Green OUT2: Red Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Fluid Air, Non-corrosive gas Temperature
(Light/Surge voltage suppressor) (Light/Surge voltage suppressor) Polarity indicator (Lead wire length) G: 300 H: 600 1-6-21 Body Ported Series SX3000/5000/7000 Dimensions: Series SX5000 Foot bracket SX5220-F1 C4 C6 C8 2 position double Grommet (G), (H): SX5220C4 C6 C8 G H G H (Light/Surge voltage suppressor) (Mounting hole) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 (
15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold gasket DXT199-21-10 Manifold gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base
DD 20(E) F-F (mm) A D Model MHS3-16D MHS3-20D MHS3-25D MHS3-32D MHS3-40D MHS3-50D MHS3-63D MHS3-80D MHS3-100D MHS3-125D B C E +0.027 0 +0.033 0 +0.033 0 +0.033 0 +0.039 0 +0.039 0 +0.039 0 +0.046 0 +0.046 0 +0.054 0 0.5 18H8 21H8 23H8 27H8 31H8 35H8 42H8 52H8 70H8 82H8 5.5 12.5 15 17 21 22 26 33 40 54 62 0.6 M2 x 0.4 5.4 0.8 5.2 1 8 M3 x 0.5 9.5 1.5 M4 x 0.7 12-7-21 21 Courtesy of Steven
OUTLINE DRAWINGS 101 to 105 10.1 Driver . 102 10.2 Connector . 104 11.
Driver type Driver select Motor select SMC Sigma Win+ SMC Sigma Win+ V5 SGDV-R90*11*Y572AA V6 SGMJV-01A3A2* 100W 200W V7 SGDV-1R6*11*Y572AA V7 SGMJV-02A3A2* LECYM2-** MECHATROLINK 400W V8 SGDV-2R8*11*Y572AA V8 SGMJV-04A3A2* V5 SGDV-R90*21*Y572AA V6 SGMJV-01A3A2* 100W MECHATROLINK 200W V7 SGDV-1R6*21*Y572AA V7 SGMJV-02A3A2* LECYU2-** 400W V8 SGDV-2R8*21*Y572AA V8 SGMJV-04A3A2* Trademarks
Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port)
. port 1/8" PE. port 1/4",3/8" 1(P),4(A),2(B),5(R1),3(R2) port 31 31 19.5 (21) 19.5 (21) G1/2 Electrical entry 1/4", 3/8" 1(P), 4(A), 2(B), 5(R1), 3(R2) port : Values for 3-position ( ): Values for 3/8" 612 A Base Mounted Plug-in Unit VQC4000 Series How to Order Manifold VV5QC 4 1 08 TD0 02 F P M L T Kit q w r !
PB07 ] () 4 1 8 1 (1+) 6 16 6 6.5 2 X-Y22 (1) 2 1 2 21 (a) PB06 GD2 PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB07 PG1 (2) 2 2 2122 ([Pr. PB06]) 22 (a) PB08 PG2 PB09 VG2 PB10 VIC (b) PA09 RSP PB06 GD2 PB07 PG1 6 17 6 (3) 2 2[Pr. PB07] 1 1 2 [Pr. PA09] 1 3 4 21([Pr. PA08]:_ _ _ 0) 21( ) 5 22([Pr. PA08]:_ _ _ 4)([Pr. PB06]) 6 7 (4) [Pr.
AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 28.6 35.2 49.5 AS421FG-04-12 AS421FG-N04-13 101 22 34.6 48.9 20.9 12 21.7 1/2" 22 101 Reference dimensions for threads after installation.
Contents Bore size (mm) 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS @0 21 Rod seal A Rod seal B 21, 22, 23 and 24 are non-replaceable parts, so they are not included in the seal kit.
20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.
43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.
17 18.5 21 22 17 18.5 21 22 21 22 17.5 20.6 22.9 28.2 25.2 28.2 31 25.2 28.2 32.6 34.4 25.2 28.2 32.6 34.4 32.6 34.4 29.4 32.5 38.5 44.8 43.5 46.5 49.3 48.3 51.3 54.1 55.9 48.3 51.3 54.1 55.9 64.3 66.1 9.3 11.6 11.6 15.2 12.8 15.2 18.5 12.8 15.2 18.5 20.9 12.8 15.2 18.5 20.9 18.5 20.9 M5 x 0.8 31 0.7 27.4 7.8 30.7 9.6 10 4.5 11.7 8 38.9 38.2 14 15.8 R 1/8 35.6 1.5 31.6 10.6 14.2 11.8 7 12
ZB-OM00201-B Revision history A P.19 Recommended tube fittings P.21 Piping to the Manifold Base B P.21 Change of description about tightening of fitting.
M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5
500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)
36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4.5-6 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)