Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting
Heat treated 1 17 Rod cover Steel ball Aluminum bearing alloy High carbon chrome bearing steel CX2 Electroless nickel plated Hard anodized 2 18 Housing Socket Brass Aluminum alloy 3 19 Piston Gasket Aluminum alloy CXW Hard chrome plated 4 20 Piston rod Rod seal Carbon steel piping for machine constructions NBR Anodized 5 21 Plate Piston seal Aluminum alloy CXT Nickel plated 6 22 Lock nut
(-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note1) Mounting direction is fixed, do not mount on opposite side.
(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.2 0.3 40 34 29 11 23 17 57 OUT 6 3 29 25 21 8 17 13 42 IN 71 61 51 20 40 30 OUT 101 8 4 53 45 38 30 15 23 IN 75 158 136 113 90 45 68 OUT 226 12 6 119 102 85 68 34 51 IN 170 281 241 201 161 80 121 OUT 402 16 8 211 181 151 121 60 91 IN 302 440 377 314 251 126 188 OUT 628 20 10 330
135 Parts Description Page 136 Dimensions Page 137, 138 Connectors Page 139 Alarm/Maintenance Page 140 Options Page 141 Specific Product Precautions Page 142 to 144 Series HEC-W Water-cooled How to Order/Specifications Page 146, 147 Cooling Capacity/Heating Capacity/ Pump Capacity (Thermo-con Outlet)/ Pressure Loss in Facility Water Circuit Page 148 to 150 Parts Description Page 151
(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10,
MGP MGP Symbol Specications 12, 16 1 to 249 12, 16 11 to 249 20, 25, 32 1 to 399 20, 25 21 to 399 40 to 100 5 to 395 32 to 100 26 to 399 Applicable stroke [mm] -XA Change of guide rod end shape -XB6 Heat resistant cylinder (10 to 150C) -XB10 Intermediate stroke (Using exclusive body) -XB13 Low speed cylinder (5 to 50 mm/s) -XB22 Shock absorber soft type RJ series type -XC4 With heavy duty
Model IX IY W H Moment of inertia of area LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 24.7 44.8 55 36 56.3 73.3 48 374 836 52 402 1000 70 122 151 70 122 151 7 40 84 15 60 177 IX IY Linear guide IX H IY Slider guide W (Except LJ1H10/LJ1S10) Features 1 rigidity and high linear precision. eved with an AC servomotor and feed screw.
Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 10 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the A
MGQ Theoretical Force MGG (N) MGC IN OUT Cylinder bore size (mm) Operating pressure (MPa) Operating direction Piston area (mm2) 0.7 0.5 0.3 MGF 84.8 IN 59 42 25 12 113 OUT 79 57 34 CY1 151 IN 106 75 45 16 201 OUT 141 101 60 MY1 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628
3 port base mounted: VK334 M3 x 26 Round head combination screw M3 x 26 Round head combination screw Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold gasket Manifold gasket Applicable base Applicable base VV3K3-20 21 VV5K3-20 21 VK300-45-1 Sub-plate VV3K3
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RZQ32-PS RZQ40-PS RZQ50-PS RZQ63-PS Contents Bore size (mm) 32 40 50 63 A set of Nos. 19, 20, 21, 22 and 24 from the table above Seal kits are sets consisting of items 19, 20, 21, 22 and 24 and can be ordered using the seal kit number for each cylinder bore size. 8 Series RZQ Dimensions Standard type (Double end tapped type)/RZQA 3-P (port size) FA H effective thread depth C Q FB G I D
QW RW S T W X Y Z Bore size (mm) 32 CXW 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Note) Rc, NPT and G ports can be selected.
Theoretical Output (N) IN OUT Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.7 0.5 0.3 84.8 IN 59 42 25 12 113 OUT 79 57 34 151 IN 106 75 45 16 201 OUT 141 101 60 236 IN 165 118 71 20 314 OUT 220 157 94 378 IN 264 189 113 25 491 OUT 344 245 147 603 IN 422 302 181 32 804 OUT 563 402 241 1056 IN 739 528 317 40 1257 OUT 880 628 377 8-27-3 4 Series CXT Weight
Rotary Angle Port side During unclamping (Extension end) 80 to 100 (9010) L type (Counterclockwise) During unclamping (Extension end) 80 to 100 (9010) R type (Clockwise) Theoretical Output Operating pressure (MPa) Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2.0 2.0 3.1 3.8 4.9 6.0 8.0 10.6 12.6 16.5 19.6 28.0 31.2 1.0 85 113 151 201 201 314 378 491
CE1R00C CE1RC 21 Counter Series CEU Operating Condition of each Output Mode One-shot output With an allowed value Without an allowed value When the counter value passes the sum of the preset value + the allowed value, output is turned ON for 100ms. When the counter value passes the preset value, output is turned ON for 100ms.
Accessories 21 to 24 (Options) 25 Technical Data Pressure dew pointCondensed water calculation chart, Pressure dew point temperatureAtmospheric pressure dew point temperature conversion cart Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity.