Electric Slide Tables

10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.

V

~120PSI 40~120 PSI Temperature Specification + -3%F.S.

Compact Cylinder with Lock Series CLQ

2099 3729 5730 100 879 1079 1723 2341 4113 6239 32 40 50 63 80 100 Additional weight Unit: g 20 35 6 4 2 152 127 121 25 45 12 8 3 174 149 140 32 64 26 17 3 137 174 159 40 77 27 17 7 149 208 192 50 118 53 32 9 221 351 326 63 158 53 32 18 288 523 498 80 261 120 49 31 638 998 959 100 380 175 116 56 1009 1307 1251 Bore size (mm) Magnet Threads Nut Rod end male threads With rubber cushion Foot

MU

MU-C02 MU-C03 MU-C04 MU-C05 MU-C06 Bore (mm) 25 32 40 50 63 Part no.

ZPT/ZPX

ZPX40HBN-B01-B8 -B10 ZPX50HBN-B01-B8 -B10 ZPX63HBN-B01-B10 -B12 ZPX 80HBN-B01-B10 -B12 ZPX100HBN-B01-B10 -B12 ZPX125HBN-B01-B10 -B12 150 275 40 50 63 80 100 125 +1 0 +10 152 271 1 +1 0 +19 166 464 2 +2 0 +37 164 460 3 +2 0 +61 235 648 6 +4 +1 +121 225 644 12 +7 +3 +228 22 How to Order ZPX 40 HB N B01 B10 Pad diameter (mm) Mounting thread 40, 50 63, 80 100, , 125 40 40 50 B 8 50 M8 x 1.25

58

(Different surfaces, Same surface), With 1 pc. 105 15 110 115 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 105 + 40(n 4) 2 110 + 40(n 4) 2 115 + 40(n 4) 2 With n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) With 2 pcs.

10

MPa 100 100 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 120 120 80 80 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 0.4 MPa 0.3 MPa 80 80 0.4 MPa 0.3 MPa 40 40 0.3 MPa 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 20 20 0.2 MPa 20 40 60 80 100 120 0 40 80 120 160 200 0 0 0 40 80 120 160 20 40 60 80 100 120 140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R

MU

50 63 Size 25 32 40 50 63 Part No.

1.1

IDF-TR7000-8 IDF-TR14000-8 IDF-TR18000-8 Mass (kg) 360 400 650 450 300 350 13 40 152 400 650 450 300 350 13 40 179 32 Thermo-cooler Series HRG Dimensions [Foundations bolt set] HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products A Mounting hole diameter: 10.5 (mm) A Nominal thread size Applicable Thermo-cooler Part no.

VCC

Description Symbol A B C D E Description For piping 12 x 9 40 swivel elbow For piping 10 x 8 40 swivel elbow For piping 10 x 7.5 40 swivel elbow For piping 8 x 6 40 swivel elbow For piping 6 x 4 40 swivel elbow Part no. VCKK1209-02F VCKK1008-02F VCKK1075-02F VCKK0806-02F VCKK0604-02F Symbol F G H J K Part no.

LEC-OM071xx

Specifications of Built-in Resistor Regenerative Power Processed Applicable DRIVER Minimum Allowable LECYU2Resistance [] Resistance [] Capacity [W] by Built-in Resistor [W] * V5, V7, V8 40 Three-phase 200 V V9 50 40 8 40 *1: The average regenerative power that can be handled is 20% of the rated capacity of the regenerative resistor built into the DRIVER. 3-28 3 Wiring and Connection 3.7.1

Compact

Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x

7

R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

Electric Rotary Table

10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 11 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

MXH Series Compact Slide

) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76 0.96 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH16 MXH16 0.16 0.3 60 0.14 60 50 0.25 50 Displacement (mm) 0.12 40 0.2 40 0.1 25, 30 25, 30 15, 20 0.15 0.08 15, 20 5, 10 0.06 0.1 5, 10 0.04

Vacuum Unit

/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Intrinsically Safe Valve

Manual override Insulator: Black () 13.6 B A Insulator: Red (+) 2 x 4.2 (Manifold mounting hole) 20 42 2 x 1/4" {A(4), B(2) port} 44 (E-type) (14) (52) 1.2 (2 x 4.2 mounting hole) 1.2 125 (49.5) 0.3 mm2 (42.5) 40 40 14.7 (39.4) 123.3 L (Lead wire length) 1/4" {P(1) port} 2 x 1/8" {EA(5), EB(3) port} 40 12.5 0.9 18 39.4 2 (23.9) EB P EA 36 2 x 2.2 (For manifold gasket positioning) (66) L-type