High Vacuum L Type Valve

48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121

CEx-OMQ0013

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.

MRQB-OM0002

2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

MXU

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121

3 Port Solenoid Valve Series VQ100 1

27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15 16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector D side end plate assembly part no. 1 2 3 VVQ100-12AFinishing O.D. 7.8 VVQ100-

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

End Lock Cylinder Series CBG1

32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200 63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Mechanical Valves Series NVM, NVFM, NVZNI

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

IDX-OM-W038

(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3

MXU

MG Minimum Operating Pressure (MPa) Symbol Specifications Min. operating pressure (MPa) 6 0.12 10 0.06 16 CX Bore size (mm) -XB13 Low speed cylinder (5 to 50 mm/s) 0.06 DTheoretical Output (N) -X Operating pressure (MPa) Operating direction Bore size (mm) 0.7 0.5 0.3 2015 11 6 IN 6 20 14 8 OUT Data 46 33 20 IN 10 55 39 24 OUT 121 86 52 IN 16 141 101 60 OUT Standard Stroke Bore size (mm) 6

Compact

0.022 16 2 0.038 20 3 0.055 25 5 0.09 Kinetic energy E [J] = 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41

VQ

Plug Lead Unit U Type (Large Flow Capacity) Mounted Manifold (VV3Q12U) VZ L1 L2 7 4-PT1/8 VS P, E port 7 16 P E P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41

IIIIIII

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: F (G)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 04 (1/2)