2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

125

Connectors for VEX3 Series Body Sizes 12, 22, 32 and 42 How to Use Plug Connector Plug Connector Lead Wire Length Caution Standard length is 300 mm, but the following lengths are also available. 1.

LEF-OM006xx

OUT -42- No. No. PLC /P25 1) No. OUT 3 INP INP LEFS 0.5 LEFB 1 4 1INP BUSYOFF 5 6 7 () 1 / EMG SVREOFF 2 /CN1 BK RLS DC24V(+) /P34 5.6 8 1 , , EMG SYREOFF /P911 2.1.

Vacuum

Flat with rib t Deep type 123 llmensions I IPY $enie Wrth Bulle Pad Diameters o4O . s50 Pad Diameters @20 . @25. @32 Flat type Deep typezPY2sD only Flat type . Flat with rib Flat type .

Vacuum

Flat with rib t Deep type 123 llmensions I IPY $eni Wrth Bulle Pad Diameters o4O . s50 Pad Diameters @20 . @25. @32 Flat type Deep typezPY2sD only Flat type . Flat with rib Flat type .

3 Position Cylinder Series RZQ

40 46 36 40 50 37 47 37.5 47.5 42.5 52.5 34.5 44.5 33 43 Auto Switch Mounting Height D-A7H D-A80H D-F7/F7F D-J79/J79W D-F7W D-F7BAL D-F7NTL Auto switch model D-M9V D-M9WV D-M9AVL D-A9V D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-P4DWL D-A7 D-A80 D-A73C D-A80C Bore size U U U U U U U U U 32 40 50 63 27 29 31.5 32.5 38.5 35 38 34 30.5 32.5 35 36 42 38.5 41.5 37.5 44 REA 36.5 38.5 41 42 48 44.5

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

3 Position Cylinder Series RZQ

U U U U U 32 31.5 32.5 38.5 35 38 34 27 29 26.5 40 35 36 42 38.5 44 41.5 37.5 30.5 32.5 30 50 41 42 48 44.5 47.5 50 43.5 36.5 38.5 36 63 47.5 48.5 54.5 51 54 50 56.5 40 42 39.5 12 Series RZQ Auto Switch Mounting Follow the procedures below to mount auto switches.

CHKD/CHKG

45 M30 x 1.5 9 30 78 185 121 3/8 31 15 31 20.5 35 17.5 123 158 57 60 M39 x 1.5 14 41 98 221 146 3/8 36 15 36 23 40 20 146 186 72 75 M48 x 1.5 21 50 118 264 286 Auto Switch Specifications CHKG Series Refer to pages 431 to 490 for detailed specifications.

VFS

With light/surge voltage suppressor: 115 (117)) (With light/surge voltage suppressor: 102.5) (With light/surge voltage suppressor: 107.5) (With light/surge voltage suppressor: 124 (126)) (With light/surge voltage suppressor: 112.5) ( ): Y, YZ Stations n: Station 10 262 292 9 237 267 8 212 242 7 187 217 6 162 192 5 137 167 4 112 142 2 62 92 3 87 117 Formula L1 = 25 x n + 12 L2 = 25 x n + 42

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model L2 L1 K J M N t W H E LQ2P2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 14.5 LQ2P2B LQ2P2C 18 6 7 31 19.9 19 16 73 LQ2P5B LQ2P5A LQ2P4B LQ2P4A LQ2P3B LQ2P3A 36 83 20.5 24 6 7 26.2 22 24 42 34.5 95 82 24.5 21 30 9 7 33.1 28 30 49 40 110 93 (E) shows the approximate dimension of the inserted tubing from the end of the nut.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 125 DS5125 140 37 97 6.3 24 110 6 7 10 50 20 60 20 13.5 30 30 42

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

e-Rodless Actuator

(A clearance of 40 or more is required.) (60) (74.7) 60 101.7 27 (40) 80 72 74.7 27 Motor 70 40 43.5 71 42 60 5 5 102 123 129 72.4 22 21.3 40 43 32 Controller FG terminal M3 4-6 counterbore depth 3.5 3.5 through 4 5.6 (Max. 8.6) 14.4 Workpiece mounting center line 4-M4 x 0.7 depth 7 9.8 15.5 5 6 16.5 28 (60.3) 87.3 T-slot section for mounting 152 + Stroke 4 I/O cable (9 wires) Motor position

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Refer to page 100 for part numbers. 123 Made to Order/TSUBAKI CABLEVEYOR Specification Series LJ1H20 Dimensions/LJ1H202 (X40) Scale: 25% Dimensions other than those shown in the drawing are the same as standard. 110 130 20 2-8H10 depth 10 4-M8 x 1.25 For work piece mounting 4-14 4-9 Mounting plate (4-M8 x 1.25) 9 15 35 Work piece mounting dimensions 92 20 138 95 10 15.5 105 135 42 This

RZQ

30.5 32.5 30 50 50 41 42 48 44.5 47.5 43.5 36.5 38.5 36 63 56.5 47.5 48.5 54.5 51 54 50 40 42 39.5 10-10-13 14 Series RZQ Mounting of Auto Switch Follow the procedures below to mount auto switches.

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 10 14 15 3 5 27 11 12 6 9 14 1 4 11 9 27 2 4 19 15 Cushion seal 8 Body Left cover Rack 18 Direction of the shaft(key) About10 Fig. (17) Direction of assembly of the shaft 42 - . Size 50 to 100 Disassembly procedure 1.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.

Plug-in/Plug Lead: Single Unit

Tool required) Option Manual override (2) 150/30 m/s2 Shock/Vibration resistance Dust tight (IP65 compatible) Protection structure Plug lead unit 12, 24 VDC, 100, 110, 200, 220 VAC (50/60 Hz) Coil rated voltage JIS Symbol 2 position single 10% of rated voltage Allowable voltage fluctuation 3 position exhaust center Class B or equivalent Coil insulation type (A) 4 (B) 2 (A) 4 (B) 2 1 W DC (42