Compact Cylinder

26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Soft start up valve with lock out

Large effective area Low power consumption AVL2000-*02 1/4 67 111 31 55 40 64 (Max. 73) Manual/Manual solenoid lock out Modular design AVL2000-*02-*DZM 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL3000-*03 3/8 76 118 36 57 48 64 (Max. 73) How to Order AVL3000-*03-*DZM 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL4000-*04 1/2 98 133 47 61 52 64 (Max. 73) G 20 00 F DZM R 5 02 AVL AVL4000

Related Products

Large effective area Low power consumption 1/4 67 111 31 55 40 64 (Max. 73) AVL2000-*02 Manual/Manual solenoid lock out Modular design 1/4 67 20.5 111 31 55 34 40 64 (Max. 73) AVL2000-*02-*DZM 3/8 76 118 36 57 48 64 (Max. 73) AVL3000-*03 How to Order 3/8 76 12.5 118 36 57 34 48 64 (Max. 73) AVL3000-*03-*DZM 1/2 98 133 47 61 52 64 (Max. 73) AVL4000-*04 G 20 00 F DZM R 5 02 AVL 1/2 98

Digital Flow Switch (Manifold type)

Width across flats of attachment With across flats of the main port 3/8 20.9 mm 1 41 mm 1/2 23.9 mm 3/4 29.9 mm After hand tightening, tighten the hexagon head bolt 2 to 3 rotations by using a spanner. Refer to the table below for the tightening torque.

MU

22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131

Title not found

0.300 0.420 0.517 0.595 0.660 0.725 0.780 0.880 1.00 1/8 1.2 1.68 2.06 2.37 2.64 2.89 3.12 3.53 4.04 1/4 4.8 6.7 8.3 9.5 10.6 11.6 12.4 14.0 16.2 3/8 10.8 15.2 18.5 21.4 23.8 26.0 28.0 31.8 36.4 1/2 19.1 27.0 33.0 38.5 42.3 46.3 50.0 56.5 64.6 5/8 30.0 42.2 51.7 59.5 66.2 72.6 78.0 88.0 101 3/4 43.0 60.6 74.0 85.3 95.2 104 112 127 145 7/8 58.8 82.6 101 116 130 142 153 173 198 1 76.5 108 131

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

Title not found

0.300 0.420 0.517 0.595 0.660 0.725 0.780 0.880 1.00 1/8 1.2 1.68 2.06 2.37 2.64 2.89 3.12 3.53 4.04 1/4 4.8 6.7 8.3 9.5 10.6 11.6 12.4 14.0 16.2 3/8 10.8 15.2 18.5 21.4 23.8 26.0 28.0 31.8 36.4 1/2 19.1 27.0 33.0 38.5 42.3 46.3 50.0 56.5 64.6 5/8 30.0 42.2 51.7 59.5 66.2 72.6 78.0 88.0 101 3/4 43.0 60.6 74.0 85.3 95.2 104 112 127 145 7/8 58.8 82.6 101 116 130 142 153 173 198 1 76.5 108 131

17

A0.2 D (mm) MGPM MGPL/A Hexagon socket head cap screw 50 56 72 82 98 106 130 142 180 210 Bore size (mm) A (mm) B (mm) C (mm) M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 10 12 14 18 22 22 27 27 33 39 41 46 54 64 78 86 110 124 156 188 18 22 24 30 34 40 46 58 54 62 5.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

LVD20 LVD30 LVD40 LVD50 LVC20 LVC30 LVC40 LVC50 A 54.5 79.5 82 105.5 54.5 79 96 129 B 114 67 83 93 79 106 131 154 Integral tubing (construction) 493 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize impact-induced particle generation.

MU

22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 11 M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 15 M12 x 1.75 depth 18 Rod End Female Thread (mm) (mm) MM M6 x 1 depth 12 H 14 14 15 18 21 ZZ 91 98 105 127 131

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

BA -01 CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

VQC

Stations 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 1 2 3 4 Description/Model A B Single PEB EA A B Double P EA EB A B Valves Options Closed center EAPEB A B Exhaust center P EA EB A B Pressure center EB P EA A B Perfect EB P EA Blanking plate VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-1-02/03 Individual EXH spacer VVQ4000-P-1-02/03 Throttle valve spacer VVQ4000-20A-1 Perfect

PSxx-OMV0003CN

) SMC Corporation 0x08 0x09 ISE70--L2ISE71--L20x0A R Device ID 0x0133(307) 0x0134(308) 0x0B -64No.PS-OMV0003CN-G ISDU 1 (10 ) 0x0002 (2) 0 W (65 ) 0x000C (12) 0 R/W 0x0 (66 ) 0x0010 (16) 0 R SMC Corporation 0x0011 (17) 0 R www.smcworld.com 0x0012 (18) 0 R ISE70-02-L2 0x0013 (19) 0 R ID ISE70-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 25 Manifold Specification Sheet Series VQC4000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 4 1 08 TD0 02 T Kit 1 2 3 7 VV5QC 4 1 16 SDQW 02 S Kit Series VQC4000 4 5 6 Base-Mounted plug-in Stations Electrical entry Options 01 1 station Nil None Special wiring specifications Note 1) (except for double wiring) D-side entry Kit

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

M L2 Pressure range Option 3 Symbol Description ISE70 0 to 1 MPa ISE71 0 to 1.6 MPa Symbol Description Nil Operation manual Y None K Operation manual + Calibration certificate Piping specification Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 T Calibration certificate Option 2 Symbol Description Nil None *1 ISO 1179-1 compliant Output specification*1 A Bracket A (Interchangeable with

High-precision Digital Pressure Switch ( compatible)

access lock 0x0 Refer to "Device Lock" on page 66. 0x000C (16) 0 R Vendor name SMC Corporation 0x0010 (17) 0 R Vendor text www.smcworld.com 0x0011 0x0012 (18) 0 R Product name Example ISE70-02-L2 (19) 0 R Product ID Example ISE70-02-L2 0x0013 (20) 0 R Product text Pressure sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string (21) 0 R Serial number Example