Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

value 0:disable, 1:enable 5..6 0..7 (Ch0 out) Upper limit value 0 to 65535 (Low byte first) 7..8 0..7 (Ch0 out) Lower limit value 0 to 65535 (Low byte first) 9..10 0..7 (Ch0 out) Fault value 0 to 65535 (Low byte first) 11..12 0..7 (Ch0 out) Idle value 0 to 65535 (Low byte first) 13..14 0..7 (Ch1 out) Upper limit value 0 to 65535 (Low byte first) 15..16 0..7 (Ch1 out) Lower limit value 0

Fieldbus system EtherCAT compatible SI Unit

value Unit 4 4045:0 Monitor upper limit 4046:0 Upper limit value 4047:0 Monitor lower limit 4048:0 Lower limit value 404A:0 Range 4050:0 Unit parameters 4051:0 Port1-Port configuration 4052:0 Port2-Port configuration 4053:0 Port3-Port configuration Unit 5 4054:0 Port4-Port configuration 4059:0 Device read / write 405A:0 L+ control 4060:0 Unit parameters 4061:0 Monitor open circuit 4062:0

Environment

0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 2 DI1 CN1-23 DI2 DI1 DI0 Program method DI-1 0 0 0 Program No. 1 0 0 1 Program No. 2 0 1 0 Program No. 3 0 1 1 Program No. 4 1 0 0 Program No. 5 Point table No.

AC Servo Motor Driver (Pulse input type)

AL.9F Battery warning AL.10 0 1 0 Undervoltage AL.E0 Excessive regeneration AL.12 0 0 0 Memory error 1 (RAM) warning AL.13 0 0 0 Clock error AL.E1 Overload warning 1 Warnings AL.15 0 0 0 Memory error 2 (EEP-ROM) AL.E3 Absolute position counter AL.16 1 1 0 Encoder error 1 warning (At power on) AL.E5 ABS time-out warning AL.17 0 0 0 Board error AL.E6 Servo emergency stop AL.19 0 0 0 Memory

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

bar 0.00 toA.00 PSI 0 to 150 kPa 0 to A00 (note1)The mark "" is blinking the decimal point, and it is shown a minus.

Air Cylinder

/16 5/16-24 3/8 3 5/8 2 1/2 1.71 1.06 3/4 0.3 1.26 2.6 4.75 1 250 (2.5") 5/8 3/8 2.48 1 1/8 7/16-20 1 1/8 2.19 9/16 5/16-24 3/8 3 3/4 3 1.75 1.06 3/4 0 1.3 3.1 4.88 1 325 (3.25") 1 1/2 2.72 1 1/2 3/4-16 1 1/2 2.76 7/8 3/8-24 1/2 4 1/4 3 3/4 2.34 1.18 1 1/8 0 1.57 3.9 5.83 1 3/8 400 (4") 1 1/2 2.72 1 1/2 3/4-16 1 1/2 3.32 7/8 3/8-24 1/2 4 1/4 4 1/2 2.34 1.18 1 1/8 0 1.57 4.7 5.83 1 3/8 Head

CEx-OMB0060

Output form O: 1SHOT output H: HOLD output C: COMPARE output Reading pre-scale setting Command Block # 0 0 P R [CR] Unit No. Command Check sum code Response Block # 0 0 P R [CR] Unit No. Command Response Status Check sum code data Response data details 1 0 0 0 0 0 1 1 Multiplication Pre-scale value Decimal point position Writing pre-scale setting Command Block # 0 0 P W [CR] Unit No.

CEx-OMI0064

# 0 0 P R [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. 1 0 0 0 0 0 1 1 # 0 0 P W [CR] No. ):0,1,2,3,4 30 - # 0 0 F R [CR] No. # 0 0 F R [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. + 0 1 2 3 4 5 # 0 0 F W [CR] No. 31 - # 0 0 S R [CR] No. # 0 0 S R [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. 0 0 1 : 0.1(s) # 0 0 S W [CR] No. )1 (0.1 )0 32 - # 0 0 O R [CR] No. # 0 0 O R [CR] No. 0

AC Servo Motor Driver (SSCNET Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) Rotation direction selection PA14 0 1 0 (+Counter motors side) (+Counter motors side) Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter should be changed.

Table of Contents

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0 @2 i @8 #0 @3 #1 @9 @0 @5 @4 @1 @7 !3 !9 @6 !2 !7 !8 t !7 !6 Enlarged drawing of shim part y !

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Air Cylinder CP Series Cylinder Positioner Assembly

7 9 t20\ 1.57 440) 0.39 1 1 0 ) 0.67 i17J d 1 0 !

Compact Proportional Solenoid Valve Series PVQ

= " 9 00 5 0 ' , > 5 0 77 $" 7 9 00 0 ++ Compact Proportional Solenoid Valve Series PVQ10 Flow Characteristics PVQ10 /% PVQ10 /%0 # # P = 0.45 MPa P = 0.7 MPa ! ! P = 0.35 MPa P = 0.5 MPa l1 l1 & & P = 0.25 MPa P = 0.35 MPa 0 0 ARJ P = 0.15 MPa P = 0.2 MPa AR425 to 935 ( ( " " AMR % % % "% (% (% 0% % !% 0% -% &% "%% !% "(% #% "0% -% "!% .% "-% "%% (%% % % % "% (% (% 0% % !

OMS0020

Available Note1) PLS OUT 1 OUT 0 ALARM BUSY DRIVE SVON IN 3 IN 2 IN 1 IN 0 Signal Reserved INP Origin SETUP SVON TL CLR IN 1 IN 0 Condition 0 0 0 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b ASCII hex "0" to "1FFF" Note 1) Changes to "1" after completion of the Return to Origin operation.

Ionizer

0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm

Hydraulic Filters

x 2 4 x M16 x 2 20 (3/4B) 145 56 100 2 x M10 x 1.5 18 9.7 108 182 330 73 255 0 25 (1B) 32 (1 1/4B) 150 180 120 108 126 98 4 x M12 x 1.75 56 70 51 100 120 90 260 361 152 435 545 285 87 94 62 347 455 214 50 60 0 0 22 12.8 40 (1 1/2B) 50 (2B) 0 4 x M12 x 1.75 2 x M10 x 1.5 22 18 20.4 6.9 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2

0.4

0 02 W 1 CE compliant CE compliant Nil Q Entry is the same as standard products.