Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-A80C D-J79C D-F79F D-F7NTL D-BAL D-J79 D-F7W D-J79W D-A79W D-F7WV D-F7V D-F7BAVL D-A7 D-A80 D-A7H D-A80H D-F7 12 to 25 32 to 50 D-A9V D-M9V D-F9WV D-A9 D-M9 D-F9W D-F9BAL 32 to 50 Proper Auto Switch Mounting Position Auto Switch Mounting Height (mm) D-A7H D-A80H D-A73C D-A80C D-F7 D-F79F D-J79 D-F7V D-J79C D-F7W D-J79W D-F7WV D-F7BAVL D-F7BAL D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL

VQ7-6/7-8

VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Electric Actuator

(2.5 to 40 mA). # The optimum operating range can be D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry determined by the color of the light.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(In-line) D-F5NTL With pre-wire connector is also available for D-F5NTL, D-F7NTL.

Table of Contents

brackets A and D.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

CJ2

Bore MM A D L R N W Flat Round TDH10 TZ TY TX TN TW TK TV Part No.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

/C8 D-H7 A B 12 Hs 14.5 24.5 Auto switch D-B5/B6 D-G5/K5 A B 8.5 Hs 14.5 11 Auto switch D-B7/B8 D-G7/K7 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-G5/K5 D-G5W D-K59W D-G5NTL D-B5/B6 D-B59W D-G5BAL D-G59F D-G5 D-K59 D-G5W D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

7

VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5

Stainless Steel 316 Fittings

of R thread Note 1) D is maximum diameter.

CATALOG VC10

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

VQZ1000/2000/3000

Dimensions Note) A B 29 33 41 D 67 81 93 C 40 52 63 VQZ1000 VQZ2000 VQZ3000 35 43 52 A Note) For grommet Individual EXH spacer VVQZ1000-R-5-M5 (VQZ1000) VVQZ2000-R-5-01 (VQZ2000) VVQZ3000-R-5-02 (VQZ3000) M5: VQZ1000 Rc 1/8: VQZ2000 Rc 1/4: VQZ3000 Exhaust port can be installed individually by mounting an individual exhaust spacer on to the manifold block.

One-touch Fittings

Q D M L 1: D is maximum diameter.

A_HEC-OM-K001

Remote off alarm 5 Fig.6-4 occurrence 6.1 How to Identify Alarm 6-1 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.2 Alarm indication BLINK E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig. 6-1 Alarm indication in the event ERR14 occurs BLINK E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig. 6-2 Alarm indication in the event ERR14 occurs during PB range setting input LIGHT W R N P

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l

TABLE OF CONTENTS

Body Brass Body Hydrolic Oil Non-Flammable NR NR NR NR Standard R R R R Hydrochloric Acid NR NR NR NR Hydrogen R R R R # Inert Gases R R R R JP4 JET Fuel V V V V JP5 JET Fuel V V V V Kerosene R R R R Ketones PP NR PP NR Lacquer PP PP PP PP Linseed Oil R R R R Lubrication R R R R Mercury R*** NR R*** NR Natural Gas R R R R Nitric Acid PP NR PP NR Nitrogen R R R R Oxalic Acid NR NR NR NR Oxygen

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.