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<br>When the LED is ON (red), this indicates a high-voltage error has occurred.<br>The main cause of this is usually foreign matter or water droplets adhering to the emitter (electrode needle).<br>Remove the cartridge and clean the emitter after stopping the power supply and air supply.

<br>Brackets can only be retrofitted for valves with an “XNB” part number suffix as they feature mounting holes on the bottom surface of the body. <br>Some VXD and VXZ series valves can be retrofitted with brackets depending on the model. <br><br>Note 1) The type with a resin body comes with brackets as standard.

<br>Keep in mind that if you wish to make changes after purchase, disassembly is required, which will void the product warranty. <br>Refer to the “Disassembly/Assembly Procedures” in the “Specific Product Precautions” section at the end of the catalog. (The VXZ series valve is not listed.) <br>The VX series catalog can be found https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=fluid-process-valves&fa_id=10545

<br>Due to the pilot type structure, a pressure differential between the inlet and outlet sides is required. <br>Check the catalog to see if the product is suitable for your application. <br>The VQ20/30 series catalog can be found here.

<br>Therefore, these valves cannot be used in circuits that require the pure water to retain its level of purity. <br>For such circuits, consider using a product from the LV series. <br>The LV series catalog can be found here.<br><br>

<br>For piping connection, pipe the vacuum pump to the A port side of the valve. <br>If the B port side is used as a vacuum source, the service life of the product may be shortened. <br>Note) LVA and LVC series valves cannot be used with chemical gases. <br>Also, they cannot be used for vacuum retention. <br>The LVA series catalog can be found https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=high-purity&fa_id=11182

<br>When using pure water (deionized water), select option “M” (deionized water piping). <br>This specification does not use copper-based materials for the wetted parts of the circulating fluid circuit. <br>Note 1) For details on water quality standards, refer to the HRS series “Specific Product Precautions.”

<br>Note 1) The discharge pressure can be set for HRSH series thermo-chillers. <br>Note 2) The pressure cannot be displayed for HRSE series thermo-chillers.

<br>Check that there is no restriction in the piping, including the customer’s device. <br>If there is restriction, thicken the piping or relieve the circulating fluid flow rate with a bypass piping set. <br>Depending on the problem, however, consider requesting maintenance from a maintenance company. <br>We can recommend service providers if needed.

<br>Alarm code “AL28” (pump maintenance) will be activated every 20,000 hours (every 8000 hours for option “T” and the HRS050/060) of operation. <br>Consider requesting maintenance from a maintenance company. <br>We can recommend service providers if needed.

<br>Even if there is no leakage, replacement of the mechanical seal is recommended. <br>The mechanical seal can be replaced up to 2 times. If foreign matter enters the circulating fluid, leakage may occur earlier. <br>For protection of the mechanical seal pump, we recommend the installation of a particle filter.

<br>When replacing, follow the replacement procedure in the operation manual and the element replacement procedure (published on the SMC website). <br>The FGD series catalog can be found here. <br>The FQ1 series catalog can be found https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=industrial-filters&fa_id=10645

<br>Note) Single-side air driving of SMC hydraulic cylinders is possible, but the increased pressure will drop if air gets inside the air-hydro booster, so be sure to drive both sides with oil whenever possible.<br><br>

<br>Further details can be found here.<br><br>

<br>Refer to the following formulas for converting the displayed values. <br>sonic conductance C x 5 = effective area S[mm2]<br>Cv x 18 ≈ effective area S[mm2]<br><br>

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page 15. 2 Body ported Manual override Nil: Non-locking push type (Tool required) B: Locking type (Tool required) Function Symbol Specifications DC AC (0.35 W) p Note 3) Nil Standard p ++(0.9 W) p B Note 1) High speed response type High pressure type (Metal seal type only) (0.9 W) p K Note 1) p p R Note 1, 2) External pilot type Electrical entry High speed response/External pilot type BR

Description AC servomotor Feed screw bl bm bn bo bp bq br bs bt 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 bk Aluminum alloy Aluminum alloy IIR PC PC High rigidity direct acting guide Bearing R Bearing F Frame Table Housing A Housing B Body cover Aluminum alloy/Stainless steel Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy 5 Series LG1H LG1H21: With Coupling/Dimensions 110

Contents Contents Contents Parts no. 6 8 12 16 20 25 6 8 12 16 20 25 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS MXS6R-PS MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS 1 set including br to bt & el to en 1 set including br to bt & dm to dp 1 set including br to bt 53 MXS Series Air Slide Table Dimensions

[inch] Model D1 D2 L Weight [g] 1/4 KQ2C-07B 11.5 7.5 2.6 0.1 3/8 KQ2C-11B 15.7 10.7 2.7 0.1 1/2 KQ2C-13B 19.6 13.9 2.7 0.2 : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) : B (Black), R (Red), YR (Orange), BR (Brown), Y (Y ellow), G (Green), CB (Sky blue), GR (Gray), W (White), BU (Blue) 26 These safety instructions are